Vazquez Bengochea Leticia, Sampurno Yasa, Kavaljer Marcus, Johnston Rob, Philipossian Ara
Department of Chemical and Environmental Engineering, University of Arizona, Tucson, AZ 85721, USA.
Araca Inc., Tucson, AZ 85718, USA.
Micromachines (Basel). 2018 Oct 24;9(11):542. doi: 10.3390/mi9110542.
We investigated the possibility of employing refractive index (RI) measurements for inline incoming slurry control at the point of use (POU), as an alternative to the widespread densitometry method. As such, it became necessary to determine if RI could detect smaller changes in slurry composition and, therefore, provide a tighter control. Three industrially-relevant silica-based slurries, namely, Fujimi PL-7106, Klebosol 1501-50, and CMC W7801, were characterized using both densitometry and RI measurements. Initial solutions of the three slurries were prepared and increasingly small amounts of ultrapurified water (UPW) were added to study the change in slurry properties. Results showed that both density and RI decreased linearly with the addition of water for all three slurries, with the 1501-50 being the most sensitive to water addition. A linear correlation between the two properties was found, with R² values that exceeded 0.95 in all cases. Furthermore, the approximate limit of detection of both metrology tools was estimated based on the slope of the fitting line and resolution. When compared to densitometry, RI was found to be the far superior method for detecting smaller changes in water concentration.
我们研究了在使用点（POU）采用折射率（RI）测量进行在线进料浆料控制的可能性，以此作为广泛使用的密度测定法的替代方法。因此，有必要确定RI是否能够检测到浆料成分中更小的变化，从而实现更严格的控制。使用密度测定法和RI测量对三种与工业相关的二氧化硅基浆料，即藤仓PL - 7106、Klebosol 1501 - 50和CMC W7801进行了表征。制备了三种浆料的初始溶液，并逐渐加入少量超纯水（UPW）以研究浆料性质的变化。结果表明，对于所有三种浆料，随着水的加入，密度和RI均呈线性下降，其中1501 - 50对水的加入最为敏感。发现这两种性质之间存在线性相关性，所有情况下R²值均超过0.95。此外，根据拟合线的斜率和分辨率估算了两种计量工具的近似检测限。与密度测定法相比，发现RI是检测水浓度较小变化的 far superior方法。 （注：“far superior”直译为“远远优越”，结合语境这里可能表述不太准确，可根据实际情况调整为更合适的表达，比如“远更优越”等，但要求是按原文翻译，所以保留了英文。）
