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晶圆级二硫化铂的制造策略。

Strategy for Fabricating Wafer-Scale Platinum Disulfide.

机构信息

School of Physics , Beijing Institute of Technology , Beijing 100081 , People's Republic of China.

Graduate Institute of Applied Physics , National Taiwan University , Taipei 106 , Taiwan.

出版信息

ACS Appl Mater Interfaces. 2019 Feb 27;11(8):8202-8209. doi: 10.1021/acsami.8b19218. Epub 2019 Feb 15.

DOI:10.1021/acsami.8b19218
PMID:30729782
Abstract

PtS is a newly developed group 10 2D layered material with high carrier mobility, wide band gap tunability, strongly bound excitons, symmetrical metallic and magnetic edge states, and ambient stability, making it attractive in nanoelectronic, optoelectronic, and spintronic fields. To the aim of application, a large-scale synthesis is necessary. For transition-metal dichalcogenide (TMD) compounds, a thermally assisted conversion method has been widely used to fabricate wafer-scale thin films. However, PtS cannot be easily synthesized using the method, as the tetragonal PtS phase is more stable. Here, we use a specified quartz part to locally increase the vapor pressure of sulfur in a chemical vapor deposition furnace and successfully extend this method for the synthesis of PtS thin films in a scalable and controllable manner. Moreover, the PtS and PtS phases can be interchangeably converted through a proposed strategy. Field-effect transistor characterization and photocurrent measurements suggest that PtS is an ambipolar semiconductor with a narrow band gap. Moreover, PtS also shows excellent gas-sensing performance with a detection limit of ∼0.4 ppb for NO. Our work presents a relatively simple way of synthesizing PtS thin films and demonstrates their promise for high-performance ultrasensitive gas sensing, broadband optoelectronics, and nanoelectronics in a scalable manner. Furthermore, the proposed strategy is applicable for making other PtX compounds and TMDs which are compatible with modern silicon technologies.

摘要

PtS 是一种新开发的 10 族二维层状材料,具有高载流子迁移率、宽带隙可调谐性、强束缚激子、对称的金属和磁性边缘态以及环境稳定性,因此在纳电子学、光电子学和自旋电子学领域具有吸引力。为了实现应用,需要进行大规模合成。对于过渡金属二卤化物 (TMD) 化合物,热辅助转化方法已被广泛用于制造晶圆级薄膜。然而,PtS 不能轻易地通过这种方法合成,因为四方相 PtS 相更稳定。在这里,我们使用特定的石英部分在化学气相沉积炉中局部增加硫的蒸气压,并成功地以可扩展和可控的方式扩展了这种方法来合成 PtS 薄膜。此外,PtS 和 PtS 相可以通过提出的策略进行互换转换。场效应晶体管特性和光电流测量表明,PtS 是一种具有窄带隙的双极性半导体。此外,PtS 还表现出优异的气体传感性能,对 NO 的检测限约为 0.4 ppb。我们的工作提供了一种相对简单的合成 PtS 薄膜的方法,并展示了它们在可扩展方式下用于高性能超灵敏气体传感、宽带光电子学和纳电子学的潜力。此外,所提出的策略适用于制造其他与现代硅技术兼容的 PtX 化合物和 TMD。

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引用本文的文献

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Electronic and structural characterisation of polycrystalline platinum disulfide thin films.多晶二硫化铂薄膜的电子与结构表征
RSC Adv. 2020 Nov 17;10(69):42001-42007. doi: 10.1039/d0ra07405e.
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J Phys Chem Lett. 2021 Sep 9;12(35):8627-8636. doi: 10.1021/acs.jpclett.1c01261. Epub 2021 Sep 2.
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