Toledo Javier, Ruiz-Díez Víctor, Bertke Maik, Suryo Wasisto Hutomo, Peiner Erwin, Sánchez-Rojas José Luis
Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain.
Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany and Laboratory for Emerging Nanometrology (LENA), Langer Kamp 6a, 38106 Braunschweig, Germany.
Micromachines (Basel). 2019 Feb 21;10(2):145. doi: 10.3390/mi10020145.
In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment.
在这项工作中,我们展示了压电谐振器在开发低成本传感器系统以实时检测微观粒子方面的潜力,这些微观粒子可能存在于各种各样的环境和工作场所中。该传感器的工作原理基于谐振器表面收集的粒子所引起的共振频率偏移。为了测试由质量加载效应获得的传感器灵敏度,将基于氮化铝的压电谐振器置于密封腔室中,使其暴露于香烟颗粒中。为了确定感兴趣的共振参数,实施了一个接口电路,并将其包含在开环和闭环方案中进行比较。该系统能够以8.8 Hz/ng的质量灵敏度跟踪共振频率。尽管此处所示的测试是通过收集香烟颗粒来证明的,但在该应用中获得的结果可能会引起关注,并且可以扩展到其他应用,例如在工作场所环境中监测纳米颗粒。