用于真空室的无胶双压电晶片镜的研制。

Development of a glue-free bimorph mirror for use in vacuum chambers.

作者信息

Ichii Yoshio, Okada Hiromi, Nakamori Hiroki, Ueda Akihiko, Yamaguchi Hiroyuki, Matsuyama Satoshi, Yamauchi Kazuto

机构信息

JTEC Corporation, 2-4-35 Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan.

Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan.

出版信息

Rev Sci Instrum. 2019 Feb;90(2):021702. doi: 10.1063/1.5066105.

DOI:10.1063/1.5066105

PMID:30831767

Abstract

PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. In this study, we developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. Under an appropriate bonding condition, the bonding layer was confirmed to be uniform and the mirror's bending characteristics were demonstrated to be sufficiently stable; its gas emission rate was also shown to be acceptable. Piezo responses before and after additional heating at 200 °C showed the thermal stability of its bonding and bending properties.

摘要

锆钛酸铅（PZT）胶合双压电晶片变形镜广泛应用于硬X射线领域；然而，它们尚未用于软X射线领域，因为它们在高真空下的兼容性较差。在本研究中，我们开发了一种无胶双压电晶片变形镜，其中使用银纳米颗粒将PZT致动器与镜基板粘结在一起。在适当的粘结条件下，粘结层被确认为均匀的，并且镜的弯曲特性被证明足够稳定；其气体排放率也被证明是可接受的。在200°C额外加热前后的压电响应表明了其粘结和弯曲性能的热稳定性。