National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230026, China.
Shanghai Institute of Ceramic, Chinese Academy of Sciences, Shanghai 201899, People's Republic of China.
Rev Sci Instrum. 2023 Jan 1;94(1):013901. doi: 10.1063/5.0102210.
Bimorph mirrors place stringent requirements on the welding technology of silicon substrates and piezoelectric ceramics to ensure their ultrahigh-vacuum compatibility. Conventional welding techniques usually require high temperature and pressure, which have a high impact on the welding substrate, while the use of organic adhesives for bonding does not guarantee their stability in ultrahigh vacuum. Here, the transient liquid phase bonding technology based on an Au-In metal system was studied to meet the requirement for ultrahigh-vacuum application. The microstructure, chemical composition, and related mechanical properties of the bonding at different welding conditions were investigated. Meanwhile, the piezo ceramics and the bond were baked at 150 °C to test the stability. The results show that a stable bonding was achieved between centimeter-scaled single crystal silicon and lead zirconate titanate ceramics at 200 °C temperature and 2.5 MPa pressure, and the piezo ceramics and the bond are not damaged by baking to 150 °C for 48 h.
双折射反射镜对硅基底和压电陶瓷的焊接技术提出了严格的要求，以确保其超高真空兼容性。传统的焊接技术通常需要高温和高压，这对焊接基底有很大的影响，而使用有机粘合剂进行键合并不能保证它们在超高真空环境下的稳定性。在这里，研究了基于 Au-In 金属系统的瞬时液相键合技术，以满足超高真空应用的要求。研究了不同焊接条件下的键合的微观结构、化学成分和相关力学性能。同时，将压电陶瓷和键合在 150°C 下烘烤，以测试其稳定性。结果表明，在 200°C 温度和 2.5 MPa 压力下，厘米级单晶硅和锆钛酸铅陶瓷之间实现了稳定的键合，并且在 150°C 下烘烤 48 小时不会损坏压电陶瓷和键合。
