Visser D, Basuvalingam S B, Désières Y, Anand S
Opt Express. 2019 Feb 18;27(4):5353-5367. doi: 10.1364/OE.27.005353.
Dielectric metasurfaces based on amorphous silicon (a-Si) nanodisks are interesting for nanophotonic applications due to the high refractive index and mature/low temperature fabrication of a-Si. The investigated metasurfaces consist of a-Si nanodisk arrays embedded in a transparent film. The diameter-dependent optical properties of the nanodisk Mie resonators have been investigated by finite-difference time-domain (FDTD) simulations and spectrally-resolved reflectivity and transmission measurements. Well-ordered substrate-free a-Si nanodisk arrays were fabricated and characterized with regard to their broadband anti-reflection properties when placed on a crystalline silicon (c-Si) surface, and reflectivity/ transmission properties when embedded in a polydimethylsiloxane (PDMS) film. Our results confirm broadband anti-reflection when placed on silicon, while the optical characteristics of the nanodisks embedded in PDMS are shown to be potentially useful for color/NIR filter applications as well as for coloring on the micro/nanoscale.
基于非晶硅（a-Si）纳米盘的介电超表面因其高折射率以及a-Si成熟的低温制造工艺，在纳米光子学应用中颇具吸引力。所研究的超表面由嵌入透明薄膜中的a-Si纳米盘阵列组成。通过时域有限差分（FDTD）模拟以及光谱分辨反射率和透射率测量，研究了纳米盘米氏谐振器的直径相关光学特性。制备了排列有序的无基底a-Si纳米盘阵列，并对其放置在晶体硅（c-Si）表面时的宽带抗反射特性以及嵌入聚二甲基硅氧烷（PDMS）薄膜时的反射率/透射率特性进行了表征。我们的结果证实了放置在硅上时的宽带抗反射特性，同时表明嵌入PDMS中的纳米盘的光学特性在颜色/近红外滤光应用以及微纳尺度着色方面具有潜在用途。
