Khan Muhammad Ammar, Bao Jing-Fu, Bao Fei-Hong, Zhou Xin
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.
Micromachines (Basel). 2019 Apr 30;10(5):296. doi: 10.3390/mi10050296.
This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor () 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor () further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5, and 3 effectively reduce the vibration displacement.
本文提出了一种采用系链结构的环形同心裂环微机电谐振器的新方法，以减少锚定损耗，并基于有限元分析（FEA）模拟给出了非常高的品质因数（297万）。这些谐振器的工作频率为188.55 MHz至188.62 MHz。当将所提出的具有非常宽且完整带隙的正方形矩形（SR）孔形一维声子晶体（1D PnC）和二维声子晶体（2D PnC）结构应用于新型设计的环形微机电系统谐振器时，通过有限元方法，品质因数分别进一步提高到1970万和17.5亿。还观察到，通过减小填充率的值，带隙变得更窄，并且所提出的SR PnC给出了广泛的峰值衰减。此外，通过用宽度分别为1.5和3的不同宽度的谐振器包围的理想匹配层（PML）技术验证了环形谐振器的谐波响应，有效地减小了振动位移。
