ACS Sens. 2019 Jul 26;4(7):1857-1863. doi: 10.1021/acssensors.9b00637. Epub 2019 May 15.
Detecting accurate concentrations of gas in environments with dynamically changing relative humidity conditions has been a challenge in gas sensing technology. We report a method to eliminate effects of humidity response in chemical-sensitive field-effect transistors using microheaters. Using a hydrogen gas sensor with Pt/FOTS active material as a test case, we demonstrate that a sensor response of 3844% to a relative humidity change of 50 to 90% at 25 °C can be reduced to a negligible response of 11.6% by utilizing microheaters. We also show the advantage of this technique in maintaining the same sensitivity in changing ambient temperatures and its application to the nitrogen dioxide gas sensors.
在相对湿度条件不断变化的环境中准确检测气体浓度一直是气体传感技术面临的挑战。我们报告了一种使用微加热器消除化学敏感场效应晶体管湿度响应影响的方法。使用具有 Pt/FOTS 活性材料的氢气传感器作为测试案例，我们证明了在 25°C 时，相对湿度从 50%变化到 90%时，传感器响应可以从 3844%降低到微加热器作用下的可忽略不计的 11.6%。我们还展示了该技术在保持在环境温度变化时相同灵敏度方面的优势，并将其应用于二氧化氮气体传感器。
