Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, Berkeley, CA, 94720, USA.
Berkeley Sensor and Actuator Center, University of California, Berkeley, Berkeley, CA, 94720, USA.
Adv Mater. 2020 May;32(21):e1908385. doi: 10.1002/adma.201908385. Epub 2020 Apr 13.
Multiplexed gas detection at room temperature is critical for practical applications, such as for tracking the complex chemical environments associated with food decomposition and spoilage. An integrated array of multiple silicon-based, chemical-sensitive field effect transistors (CSFETs) is presented to realize selective, sensitive, and simultaneous measurement of gases typically associated with food spoilage. CSFETs decorated with sensing materials based on ruthenium, silver, and silicon oxide are used to obtain stable room-temperature responses to ammonia (NH ), hydrogen sulfide (H S), and humidity, respectively. For example, one multi-CSFET sensor signal changes from its baseline by 13.34 in response to 1 ppm of NH , 724.45 under 1 ppm H S, and 23.46 under 80% relative humidity, with sensitive detection down to 10 ppb of NH and H S. To demonstrate this sensor for practical applications, the CSFET sensor array is combined with a custom-printed circuit board into a compact, fully integrated, and portable system to conduct real-time monitoring of gases generated by decomposing food. By using existing silicon-based manufacturing methodologies, this room-temperature gas sensing array can be fabricated reproducibly and at low cost, making it an attractive platform for ambient gas measurement needed in food safety applications.
室温下的多路气体检测对于实际应用至关重要，例如跟踪与食物分解和变质相关的复杂化学环境。本文提出了一种集成的硅基多化学敏感场效应晶体管 (CSFET) 阵列，以实现对通常与食物变质相关的气体的选择性、灵敏和同时测量。用基于钌、银和氧化硅的传感材料修饰的 CSFET 分别用于获得对氨 (NH )、硫化氢 (H S) 和湿度的稳定室温响应。例如，一个多 CSFET 传感器信号在响应 1 ppm 的 NH 时从基线变化 13.34，在响应 1 ppm 的 H S 时变化 724.45，在相对湿度为 80% 时变化 23.46，对 NH 和 H S 的灵敏检测低至 10 ppb。为了展示这种传感器在实际应用中的应用，CSFET 传感器阵列与定制印刷电路板结合在一起，构成一个紧凑、完全集成和便携式系统，用于实时监测食物分解产生的气体。通过使用现有的硅基制造方法，这种室温气体传感阵列可以可重复且低成本地制造，使其成为食品安全应用中所需的环境气体测量的有吸引力的平台。
