Petra Rafidah, Oo Swe Zin, Tarazona Antulio, Cernansky Robert, Reynolds Scott A, Khokhar Ali Z, Mittal Vinita, Thomson David J, Politi Alberto, Mashanovich Goran Z, Reed Graham T, Chong Harold M H
Opt Express. 2019 May 27;27(11):15735-15749. doi: 10.1364/OE.27.015735.
We present interlayer slope waveguides, designed to guide light from one level to another in a multi-layer silicon photonics platform. The waveguide is fabricated from hydrogenated amorphous silicon (a-Si:H) film, deposited using hot-wire chemical vapor deposition (HWCVD) at a temperature of 230°C. The interlayer slope waveguide is comprises of a lower level input waveguide and an upper level output waveguide, connected by a waveguide on a slope, with vertical separation to isolate other crossing waveguides. Measured loss of 0.17 dB/slope was obtained for waveguide dimensions of 600 nm waveguide width (w) and 400 nm core thickness (h) at a wavelength of 1550 nm and for transverse electric (TE) mode polarization.
我们展示了层间倾斜波导，其设计用于在多层硅光子学平台中将光从一层引导到另一层。该波导由氢化非晶硅（a-Si:H）薄膜制成，采用热丝化学气相沉积（HWCVD）在230°C的温度下沉积。层间倾斜波导由下层输入波导和上层输出波导组成，通过斜坡上的波导连接，具有垂直间距以隔离其他交叉波导。对于600 nm波导宽度（w）和400 nm纤芯厚度（h）的波导尺寸，在1550 nm波长下以及横向电（TE）模式偏振下，测得的损耗为0.17 dB/斜坡。
