Wang Yihang, Fu Qiang, Zhang Yufeng, Zhang Wenbo, Chen Dongliang, Yin Liang, Liu Xiaowei
MEMS center, Harbin Institute of Technology, Harbin 150001, China.
Key Laboratory of Micro-structures Manufacturing (Harbin Institute of Technology), Ministry of Education, Harbin 150001, China.
Sensors (Basel). 2020 Jan 27;20(3):687. doi: 10.3390/s20030687.
A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force balance mode with four control loops. A closed self-excited loop realizes stable vibration amplitude on the basis of peak detection technology and phase control loop. Force-to-rebalance technology is employed for the closed sense loop. A high-frequency carrier loaded on an anchor weakens the effect of parasitic capacitances coupling. The signal detected by the charge amplifier is demodulated and converted into a digital output for subsequent processing. Considering compatibility with digital circuits and output precision demands, a low passband sigma-delta (ΣΔ) analog-to-digital converter (ADC) is implemented with a 111.8dB signal-to-noise ratio (SNR). The analog front-end and digital closed self-excited loop is manufactured with a standard 0.35 µm complementary metal-oxide-semiconductor (CMOS) technology. The experimental results show a bias instability of 2.1 °/h and a nonlinearity of 0.035% over the ± 400° full-scale range.
本文提出了一种微机电系统（MEMS）磁盘谐振器陀螺仪（DRG）的数字闭环系统设计。基于传感元件的结构特性和工作模式，提供了包含非理想因素的振动模型。该DRG在力平衡模式下运行，具有四个控制回路。一个闭合自激回路基于峰值检测技术和相位控制回路实现稳定的振动幅度。闭合传感回路采用力再平衡技术。加载在固定端的高频载波减弱了寄生电容耦合的影响。电荷放大器检测到的信号被解调并转换为数字输出以便后续处理。考虑到与数字电路的兼容性和输出精度要求，实现了一个具有111.8dB信噪比（SNR）的低通带sigma-delta（ΣΔ）模数转换器（ADC）。模拟前端和数字闭合自激回路采用标准的0.35μm互补金属氧化物半导体（CMOS）技术制造。实验结果表明，在±400°满量程范围内，偏置不稳定性为2.1°/h，非线性度为0.035%。
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