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基于压电驱动的新型三自由度旋转振动辅助微抛光系统的研制

Development of a Novel Three Degrees-of-Freedom Rotary Vibration-Assisted Micropolishing System Based on Piezoelectric Actuation.

作者信息

Gu Yan, Chen Xiuyuan, Lu Faxiang, Lin Jieqiong, Yi Allen, Feng Jie, Sun Yang

机构信息

School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China.

Department of Industrial, Welding and Systems Engineering, Ohio State University, Columbus, OH 43210, USA.

出版信息

Micromachines (Basel). 2019 Jul 29;10(8):502. doi: 10.3390/mi10080502.

DOI:10.3390/mi10080502
PMID:31362379
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6722868/
Abstract

The limited degrees of freedom (DOF) and movement form of the compliant vibration-assisted processing device are inherent constraints of the polishing technique. In this paper, a concept of a 3-DOF rotary vibration-assisted micropolishing system (3D RVMS) is proposed and demonstrated. The 3-DOF means the proposed vibration-assisted polishing device (VPD) is driven by three piezo-electric (PZT) actuators. Compared with the current vibration-assisted polishing technology which generates a trajectory with orthogonal actuators or parallel actuators, a novel 3-DOF piezoelectrically actuated VPD was designed to enable the workpiece to move along the rotational direction. Meanwhile, the proposed VPD can deliver large processing stoke in mrad scale and can be operated at a flexible non-resonant mode. A matrix-based compliance modeling method was adopted for calculating the compliance and amplification ratio of the VPD. Additionally, the dynamic and static properties of the developed VPD were verified using finite element analysis. Then, the VPD was manufactured and experimentally tested to investigate its practical performance. Finally, various polished surfaces which used silicon carbide (SiC) ceramic as workpiece material were uniformly generated by the high-performance 3D RVMS. Compared with a nonvibration polishing system, surface roughness was clearly improved by introducing rotary vibration-assisted processing. Both the analysis and experiments verified the effectiveness of the present 3D RVMS for micro-machining surfaces.

摘要

柔顺振动辅助加工装置有限的自由度（DOF）和运动形式是抛光技术的固有约束。本文提出并演示了一种三自由度旋转振动辅助微抛光系统（3D RVMS）的概念。三自由度意味着所提出的振动辅助抛光装置（VPD）由三个压电（PZT）致动器驱动。与当前使用正交致动器或平行致动器生成轨迹的振动辅助抛光技术相比，设计了一种新型的三自由度压电驱动VPD，使工件能够沿旋转方向移动。同时，所提出的VPD能够在毫弧度尺度上提供大的加工行程，并且可以在灵活的非共振模式下运行。采用基于矩阵的柔顺性建模方法来计算VPD的柔顺性和放大率。此外，使用有限元分析验证了所开发VPD的动态和静态特性。然后，制造了VPD并进行了实验测试，以研究其实际性能。最后，由高性能3D RVMS均匀地生成了以碳化硅（SiC）陶瓷为工件材料的各种抛光表面。与非振动抛光系统相比，引入旋转振动辅助加工明显改善了表面粗糙度。分析和实验均验证了当前3D RVMS用于微加工表面的有效性。

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本文引用的文献

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Micromachines (Basel). 2018 Sep 29;9(10):499. doi: 10.3390/mi9100499.
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Design and Performance Testing of a Novel Three-Dimensional Elliptical Vibration Turning Device.
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Subsurface Damage in Polishing Process of Silicon Carbide Ceramic.碳化硅陶瓷抛光过程中的亚表面损伤
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