Gu Yan, Chen Xiuyuan, Lin Jieqiong, Lu Mingming, Lu Faxiang, Zhang Zheming, Yang Hao
School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China.
Changchun Equipment and Technology Research Institute, Norinco Group, Changchun 130012, China.
Micromachines (Basel). 2018 Sep 29;9(10):499. doi: 10.3390/mi9100499.
This paper aims to create a high-quality surface based on the linear contact material removal mechanism. For this paper, a piezo-driven, flexure-based micro-motion stage was developed for the vibration-assisted roll-type precision polishing system. Meanwhile, the compliance matrix method was employed to establish the amplification ratio and compliance model of the flexure mechanism. The dimensions of the mechanism were optimized using the grey wolves optimization (GWO) algorithm, aiming to maximize the natural frequencies. Using the optimal parameters, the established models for the mechanical performance evaluation of the flexure stage were verified with the finite-element method. Through closed-loop test, it was proven that the proposed micro-motion stage performs well in positioning micro motions. Finally, high quality surface using silicon carbide (SiC) ceramic with 36 nm Sa was generated by the independently developed vibration-assisted roll-type polishing machine to validate the performance of the established polishing system.
本文旨在基于线性接触材料去除机制创建高质量表面。针对本文，为振动辅助辊式精密抛光系统开发了一种压电驱动、基于柔性铰链的微运动平台。同时，采用柔度矩阵法建立了柔性铰链机构的放大比和柔度模型。利用灰狼优化（GWO）算法对机构尺寸进行了优化，旨在使固有频率最大化。使用优化后的参数，通过有限元方法验证了所建立的柔性平台力学性能评估模型。通过闭环测试，证明所提出的微运动平台在微运动定位方面表现良好。最后，利用自主研发的振动辅助辊式抛光机对36 nm Sa的碳化硅（SiC）陶瓷进行加工，获得了高质量表面，以验证所建立抛光系统的性能。
