Park Min Young, Ji Jae-Hoon, Kamiko Masao, Ha Jae-Geun, Koh Jung-Hyuk
School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Korea.
Institute of Industrial Science, The University of Tokyo, Meguro, Tokyo 153-8505, Japan.
J Nanosci Nanotechnol. 2020 Jan 1;20(1):616-620. doi: 10.1166/jnn.2020.17272.
Recently, many researches on Al-doped ZnO (AZO) thin film based transparent conducting oxide (TCO) have been intensively investigated for the electronic and display device applications. In this study, AZO thin films with different thicknesses were deposited on polyethylene terephthalate (PET) substrates by sol-gel spin coating at a relatively low temperature. By optimizing the AZO thickness, maximum figure of merit (FOM) values were investigated and discussed. Commonly, PET substrates are used in the fabrication of flexible display devices. However, because of the low melting temperature of the PET substrate (~200 °C), AZO thin films spin-coated on PET substrates cannot be subjected to crystallization at high temperatures. Therefore, alternative advanced optical annealing method was considered to crystalize the AZO thin films on the PET substrates. In this experiment, optical annealing method will be proposed. To increase electrical conductivity, Platinum (Pt) dots were sprayed on the AZO sample to improve the electric conductivity. The Pt-spotted AZO thin films on flexible PET substrates prepared by sputtering exhibited high electrical conductivities and high optical transmittances. The 0.63 nm-thick Pt/AZO/PET film exhibited a transmittance of 80% in the 380-800 nm range and the 3.78 nm-thick Pt/AZO/PET film exhibited a resistivity of 5.61×10 Ώ·m. Notably, the 159 nm-thick Pt/AZO/PET film exhibited an FOM of 156. Moreover, the sheet resistances and transmittances of the prepared AZO/PET films were determined.
最近，许多关于基于铝掺杂氧化锌（AZO）薄膜的透明导电氧化物（TCO）的研究已被深入探讨，用于电子和显示设备应用。在本研究中，通过溶胶 - 凝胶旋涂法在相对较低的温度下将不同厚度的AZO薄膜沉积在聚对苯二甲酸乙二醇酯（PET）基板上。通过优化AZO厚度，研究并讨论了最大品质因数（FOM）值。通常，PET基板用于制造柔性显示设备。然而，由于PET基板的低熔点（约200°C），旋涂在PET基板上的AZO薄膜不能在高温下进行结晶。因此，考虑采用替代的先进光学退火方法来使PET基板上的AZO薄膜结晶。在本实验中，将提出光学退火方法。为了提高电导率，在AZO样品上喷涂铂（Pt）点以改善电导率。通过溅射制备的柔性PET基板上的Pt点掺杂AZO薄膜表现出高电导率和高光学透过率。0.63nm厚的Pt/AZO/PET薄膜在380 - 800nm范围内的透过率为80%，3.78nm厚的Pt/AZO/PET薄膜的电阻率为5.61×10Ω·m。值得注意的是，159nm厚的Pt/AZO/PET薄膜的FOM为156。此外，还测定了制备的AZO/PET薄膜的方块电阻和透过率。
