Kaltwasser Mahsa, Schmidt Udo, Lösing Lars, Biswas Shantonu, Stauden Thomas, Bund Andreas, Jacobs Heiko O
Fachgebiet Nanotechnologie, Technische Universität Ilmenau, Gustav-Kirchhoff-Strasse 1, Ilmenau, D-98693, Germany.
Fachgebiet Elektrochemie und Galvanotechnik, Technische Universität Ilmenau, Gustav-Kirchhoff-Strasse 6, Ilmenau, D-98693, Germany.
Sci Rep. 2019 Aug 5;9(1):11325. doi: 10.1038/s41598-019-47690-8.
This communication presents fluidic self-assembly of Si-chip on a sequentially electroplated multilayer solder bump with tailored transformation imprinted melting points. The multilayer solder bump is a lead free ternary solder system, which provides a route to transform the melting point of interconnects for applications in solder directed fluidic self-assembly. The outermost metal layers form a low melting point BiIn solder shell (72 °C). This solder shell enables fluidic self-assembly and self-alignment of freely in water suspended Si-dies at relatively low temperature (75 °C) leading to well-ordered chip arrays. The reduction of the free surface energy of the shell-water interface provides the driving force for the self-assembly. The lowermost metal layer is a high melting point solder and acts as a core. After the self-assembly is complete, a short reflow causes the transformation of the core and the shell yielding a stable high melting point solder with adjustable melting points. The chosen ternary solder system enables the realization of interconnects with melting points in the range of 112 °C to 206 °C.
本文介绍了在具有定制转变熔点的顺序电镀多层焊料凸块上进行硅芯片的流体自组装。多层焊料凸块是一种无铅三元焊料系统,它为改变互连熔点提供了一条途径,以用于焊料导向的流体自组装应用。最外层金属层形成低熔点的铋铟焊料壳(72°C)。该焊料壳能够在相对较低温度(75°C)下实现水中自由悬浮的硅芯片的流体自组装和自对准,从而形成有序的芯片阵列。壳 - 水界面自由表面能的降低为自组装提供了驱动力。最底层金属层是高熔点焊料,用作核心。自组装完成后,短暂的回流会导致核心和外壳转变,产生熔点可调的稳定高熔点焊料。所选择的三元焊料系统能够实现熔点在112°C至206°C范围内的互连。