Varricchio Stefano S G, Piacentini Niccoló, Bertsch Arnaud, Renaud Philippe
École Polytechnique Fédérale de Lausanne, STI IMT LMIS4, Station 17, CH-1015 Lausanne, Switzerland.
ACS Omega. 2017 Jun 1;2(6):2387-2394. doi: 10.1021/acsomega.7b00084. eCollection 2017 Jun 30.
We present an innovative fabrication method for solid-state nanoporous membranes based on the casting of sacrificial silicon nanostructures. The process allows the individual definition of geometry and placement of each nanopore through e-beam lithography and is compatible with a wide range of materials without the need to adapt the process to the materials used. We demonstrate the fabrication of membranes integrating high aspect-ratio nanopores with critical dimensions as small as 30 nm, 1.2 μm in length, with round or elongated shapes, and made of silicon dioxide or amorphous carbon. The capability to engineer nanoporous membranes made of a variety of materials and with tailored designs will lead to new applications in the field of electrochemical sensing, flow modulation, or the chemical functionalization of nanopores.
我们提出了一种基于牺牲性硅纳米结构铸造的固态纳米多孔膜创新制造方法。该工艺允许通过电子束光刻单独定义每个纳米孔的几何形状和位置，并且与多种材料兼容，无需根据所用材料调整工艺。我们展示了集成高纵横比纳米孔的膜的制造，这些纳米孔的关键尺寸小至30nm，长度为1.2μm，具有圆形或细长形状，由二氧化硅或非晶碳制成。制造由多种材料制成且具有定制设计的纳米多孔膜的能力将在电化学传感、流量调制或纳米孔化学功能化领域带来新的应用。
