Institute for Photonics and Nanotechnologies , CNR , 00156 Rome , Italy.
Dipartimento di Scienze , Università degli Studi Roma TRE , 00146 Rome , Italy.
ACS Appl Mater Interfaces. 2019 Sep 25;11(38):35079-35087. doi: 10.1021/acsami.9b09681. Epub 2019 Sep 11.
We report on the investigation of the Schottky barrier (SB) formed at the junction between a metal-free graphene monolayer and Ge semiconductor substrate in the as-grown epitaxial graphene/Ge(100) system. In order to preserve the heterojunction properties, we defined submicron size graphene/Ge junctions using the scanning probe microscopy lithography in the local oxidation configuration, a low-invasive processing approach capable of inducing spatially controlled electrical separations among tiny graphene regions. Characteristic junction parameters were estimated from - curves obtained using conductive-atomic force microscopy. The current-voltage characteristics showed a p-type Schottky contact behavior, ascribed to the n-type to p-type conversion of the entire Ge substrate due to the formation of a large density of acceptor defects during the graphene growth process. We estimated, for the first time, the energy barrier height in the as-grown graphene/Ge Schottky junction (φ ≈ 0.45 eV) indicating an n-type doping of the graphene layer with a Fermi level ≈ 0.15 eV above the Dirac point. The SB devices showed ideality factor values around 1.5 pointing to the high quality of the heterojunctions.
我们报告了在生长的外延石墨烯/Ge(100)系统中,金属自由的石墨烯单层和 Ge 半导体衬底之间的结处形成的肖特基势垒 (SB) 的研究。为了保持异质结的性质,我们使用扫描探针显微镜光刻术在局部氧化配置中定义了亚微米大小的石墨烯/Ge 结,这是一种低侵入性的处理方法,能够在微小的石墨烯区域之间产生空间控制的电分离。使用导电原子力显微镜获得的 I-V 曲线估计了特征结参数。电流-电压特性表现出 p 型肖特基接触行为,这归因于在石墨烯生长过程中由于形成了大量受主缺陷,整个 Ge 衬底从 n 型转变为 p 型。我们首次估计了生长的石墨烯/Ge 肖特基结中的能垒高度(φ≈0.45 eV),表明石墨烯层的 n 型掺杂,费米能级比狄拉克点高约 0.15 eV。SB 器件的理想因子值约为 1.5,表明异质结的质量很高。