Opt Lett. 2019 Sep 15;44(18):4463-4466. doi: 10.1364/OL.44.004463.
We propose a snapshot and compact multiwavelength interferometer for real-time testing of optical surfaces with large slopes. A color camera with a micropolarizer array simultaneously captures the phase-shifted interferograms of multiple wavelengths, from which four interferograms with π/2 phase shift at each wavelength are extracted for multiwavelength phase-shifting interferometric measurement. The accuracy of the proposed system is validated experimentally, and the testing of freeform surface with large slopes is also demonstrated. The proposed system provides a feasible way to obtain the instantaneous online measurement of freeform surfaces while minimizing environmental disturbance.
我们提出了一种快照和紧凑型多波长干涉仪，用于实时测试具有大斜率的光学表面。一个带有微偏光镜阵列的彩色相机可以同时捕获多个波长的相移干涉图，从中提取每个波长的四个具有 π/2 相移的干涉图，用于多波长相移干涉测量。实验验证了所提出系统的准确性，并展示了大斜率自由曲面的测试。所提出的系统提供了一种可行的方法，可在最小化环境干扰的同时实现自由曲面的瞬时在线测量。
