Tian Xiaobo, Tu Xingzhou, Zhang Junchao, Spires Oliver, Brock Neal, Pau Stanley, Liang Rongguang
Opt Express. 2018 Jul 9;26(14):18279-18291. doi: 10.1364/OE.26.018279.
A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with 𝜋/2 phase shift are captured at each wavelength for phase measurement, the 2𝜋 ambiguities are removed by using two or three wavelengths.
提出了一种快照多波长干涉显微镜，用于对大垂直范围的不连续微结构和表面粗糙度进行高速测量。带有线性微偏振器阵列和拜耳滤光片的偏振互补金属氧化物半导体（CMOS）相机实现了快照多波长相移测量。在每个波长处捕获具有π/2相移的四幅干涉图用于相位测量，通过使用两个或三个波长消除了2π模糊度。
