Voiculescu Ioana, Li Fang, Kowach Glen, Lee Kun-Lin, Mistou Nicolas, Kastberg Russell
Mechanical Engineering Department, City College of New York, New York, NY 10031, USA.
Mechanical Engineering Department, New York Institute of Technology, New York, NY 11568, USA.
Micromachines (Basel). 2019 Sep 30;10(10):661. doi: 10.3390/mi10100661.
The paper describes a stretchable, microfabricated power generator that will be attached on the skin and will produce energy based on the movements of the human body. The device was fabricated on a polymeric, elastomeric, poly(dimethylsiloxane) (PDMS) sheet. It consists of a piezoelectric thin film of ZnO sandwiched between two stretchable gold electrodes. An innovative technique was used for the deposition of ZnO thin film on the gold electrode-coated polymeric substrate at low temperatures below 150 °C. This is the first attempt to use a uniform film of ZnO, for energy harvesting. The ZnO film had the thickness at the submicron scale and the surface at the centimeter scale. We demonstrated that under a strain of 8% the voltage output from this power generator was equal to 2 V, the power output was equal to 160 μW and the corresponding power density was 1.27 mW/cm. This device has great potential for application in power sensors attached on the human body, such as temperature sensors or wearable electrocardiography systems.
该论文描述了一种可拉伸的微型制造的发电机，它将附着在皮肤上，并根据人体运动产生能量。该装置是在聚合物弹性体聚二甲基硅氧烷（PDMS）片材上制造的。它由夹在两个可拉伸金电极之间的氧化锌压电薄膜组成。采用了一种创新技术，在低于150°C的低温下，在涂有金电极的聚合物基板上沉积氧化锌薄膜。这是首次尝试使用均匀的氧化锌薄膜进行能量收集。氧化锌薄膜的厚度为亚微米级，表面为厘米级。我们证明，在8%的应变下，该发电机的电压输出等于2V，功率输出等于160μW，相应的功率密度为1.27mW/cm。该装置在附着于人体的功率传感器，如温度传感器或可穿戴心电图系统中具有巨大的应用潜力。
