Li Wei, Cao Yunqi, Sepúlveda Nelson
Department of Mechanical Engineering, University of Vermont, 33 Colchester Ave., Burlington, VT 05405, USA.
College of Control Science and Engineering, Zhejiang University, 38 Zheda Rd., Hangzhou 310027, China.
Micromachines (Basel). 2022 Dec 30;14(1):99. doi: 10.3390/mi14010099.
In wearable or implantable biomedical devices that typically rely on battery power for diagnostics or operation, the development of flexible piezoelectric nanogenerators (NGs) that enable mechanical-to-electrical energy harvesting is finding promising applications. Here, we present the construction of a flexible piezoelectric nanogenerator using a thin film of room temperature deposited nanocrystalline aluminium nitride (AlN). On a thin layer of aluminium (Al), the AlN thin film was grown using pulsed laser deposition (PLD). The room temperature grown AlN film was composed of crystalline columnar grains oriented in the (100)-direction, as revealed in images from transmission electron microscopy (TEM) and X-ray diffraction (XRD). Fundamental characterization of the AlN thin film by piezoresponse force microscopy (PFM) indicated that its electro-mechanical energy conversion metrics were comparable to those of c-axis oriented AlN and zinc oxide (ZnO) thin films. Additionally, the AlN-based flexible piezoelectric NG was encapsulated in polyimide to further strengthen its mechanical robustness and protect it from some corrosive chemicals.
在通常依靠电池供电进行诊断或操作的可穿戴或植入式生物医学设备中，能够实现机械能到电能收集的柔性压电纳米发电机（NGs）的开发正展现出广阔的应用前景。在此，我们展示了一种使用室温沉积的纳米晶氮化铝（AlN）薄膜构建的柔性压电纳米发电机。在一层薄铝（Al）上，采用脉冲激光沉积（PLD）生长AlN薄膜。如透射电子显微镜（TEM）和X射线衍射（XRD）图像所示，室温生长的AlN薄膜由沿（100）方向取向的结晶柱状晶粒组成。通过压电响应力显微镜（PFM）对AlN薄膜进行的基础表征表明，其机电能量转换指标与c轴取向的AlN薄膜和氧化锌（ZnO）薄膜相当。此外，基于AlN的柔性压电纳米发电机被封装在聚酰亚胺中，以进一步增强其机械坚固性，并保护它免受某些腐蚀性化学物质的影响。
