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氮化镓微纳柱超高灵敏度压电效应的研究

Study on ultra-high sensitivity piezoelectric effect of GaN micro/nano columns.

作者信息

Fu Jianbo, Zong Hua, Hu Xiaodong, Zhang Haixia

机构信息

National Key Lab of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, 100871, China.

State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing, 100871, People's Republic of China.

出版信息

Nano Converg. 2019 Oct 22;6(1):33. doi: 10.1186/s40580-019-0203-4.

DOI:10.1186/s40580-019-0203-4
PMID:31637535
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6803610/
Abstract

High-quality GaN micro/nano columns were prepared with self-organized catalytic-free method. Young's modulus of GaN nanocolumns were measured under both compressive stress and tensile stress. It was found that the Young's modulus decreases with the increasing of nanocolumn diameter due to the increase of face defect density. Furthermore, we measured the piezoelectric properties and found that there was a 1000-fold current increase under a strain of 1% with a fixed bias voltage of 10 mV. Based on the Schottky Barrier Diode model, we modified it with the effect of polarization charge, image charge and interface state to analyze the experiment results which reveals that the strong piezopolarization effect plays an important role in this phenomenon. Therefore, the GaN nanocolumns has a great prospect to be applied in high-efficiency nanogenerators and high-sensitivity nanosensors.

摘要

采用自组织无催化方法制备了高质量的氮化镓微/纳米柱。在压缩应力和拉伸应力下测量了氮化镓纳米柱的杨氏模量。发现由于表面缺陷密度的增加,杨氏模量随纳米柱直径的增加而降低。此外,我们测量了压电性能,发现在1% 的应变和10 mV 的固定偏置电压下,电流增加了1000倍。基于肖特基势垒二极管模型,我们用极化电荷、镜像电荷和界面态的影响对其进行了修正,以分析实验结果,结果表明强压电极化效应在这一现象中起重要作用。因此,氮化镓纳米柱在高效纳米发电机和高灵敏度纳米传感器方面具有广阔的应用前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/27967278d911/40580_2019_203_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/5c7f67ed195f/40580_2019_203_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/4515d4fea71f/40580_2019_203_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/2398981d5d9c/40580_2019_203_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/a6d95cf25ffc/40580_2019_203_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/011e5c9ef4eb/40580_2019_203_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/27967278d911/40580_2019_203_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/5c7f67ed195f/40580_2019_203_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/4515d4fea71f/40580_2019_203_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/2398981d5d9c/40580_2019_203_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/a6d95cf25ffc/40580_2019_203_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/011e5c9ef4eb/40580_2019_203_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1916/6803610/27967278d911/40580_2019_203_Fig6_HTML.jpg

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