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基于 AlN 的柔性压电压力传感器的制作与特性分析及其在植入式人工胰腺中的应用。

Fabrication and characterization of AlN-based flexible piezoelectric pressure sensor integrated into an implantable artificial pancreas.

机构信息

CNR-IMM Institute for Microelectronics and Microsystems, Via Monteroni, 73100, Lecce, Italy.

BioRobotics Institute and Department of Excellence in Robotics & AI, Scuola Superiore Sant'Anna, 56025, Pontedera, Italy.

出版信息

Sci Rep. 2019 Nov 20;9(1):17130. doi: 10.1038/s41598-019-53713-1.

Abstract

This study reports on the fabrication and characterization of an event detection subsystem composed of a flexible piezoelectric pressure sensor and the electronic interface to be integrated into an implantable artificial pancreas (IAP) for diabetic patients. The developed sensor is made of an AlN layer, sandwiched between two Ti electrodes, sputtered on Kapton substrate, with a preferential orientation along c-axis which guarantees the best piezoelectric response. The IAP is made of an intestinal wall-interfaced refilling module, able to dock an ingestible insulin capsule. A linearly actuated needle punches the duodenum tissue and then the PDMS capsule to transfer the insulin to an implanted reservoir. The device is located at the connection of the needle with the linear actuator to reliably detect the occurred punching of the insulin-filled capsule. Finite Element Analysis (FEA) simulations were performed to evaluate the piezoelectric charge generated for increasing loads in the range of interest, applied on both the sensor full-area and footprint area of the Hamilton needle used for the capsule punching. The sensor-interface circuit was simulated to estimate the output voltage that can be obtained in real operating conditions. The characterization results confirmed a high device sensitivity during the punching, in the low forces (0-4 N) and low actuator speed (2-3 mm/s) ranges of interest, meeting the requirement of the research objective. The choice of a piezoelectric pressure sensor is particularly strategic in the medical field due to the request of self-powered implantable devices which do not need any external power source to output a signal and harvest energy from natural sources around the patient.

摘要

本研究报告了一种事件检测子系统的制造和特性,该子系统由柔性压电压力传感器和电子接口组成,将被集成到用于糖尿病患者的植入式人工胰腺(IAP)中。所开发的传感器由氮化铝(AlN)层组成,夹在两个钛(Ti)电极之间,溅射在 Kapton 基底上,具有沿 c 轴的择优取向,保证了最佳的压电响应。IAP 由与肠壁接口的再填充模块组成,能够对接可摄入的胰岛素胶囊。线性致动器驱动的针刺穿十二指肠组织和 PDMS 胶囊,将胰岛素转移到植入式储液器中。该设备位于针与线性致动器的连接处,可可靠地检测到已穿孔的充满胰岛素的胶囊。进行了有限元分析(FEA)模拟,以评估在感兴趣的范围内,对传感器整个区域和用于胶囊穿孔的 Hamilton 针的足迹区域施加的增加的负载,所产生的压电电荷。模拟了传感器接口电路,以估算在实际操作条件下可获得的输出电压。特性分析结果证实了在穿孔过程中,在低力(0-4N)和低致动器速度(2-3mm/s)范围内,该设备具有较高的灵敏度,满足研究目标的要求。在医疗领域中,选择压电压力传感器尤为重要,因为需要自供电的植入式设备,这些设备无需任何外部电源即可输出信号,并从患者周围的自然源中获取能量。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/24fe/6868010/4f1fc26b93e1/41598_2019_53713_Fig1_HTML.jpg

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