Pettinato Sara, Barettin Daniele, Sedov Vadim, Ralchenko Victor, Salvatori Stefano
Engineering Faculty, Università Niccolò Cusano, Via don Gnocchi 3, 00166 Rome, Italy.
Istituto di Struttura della Materia, Consiglio Nazionale delle Ricerche (ISM-CNR), Sede Secondaria di Montelibretti, Via Salaria km 29,300, Monterotondo Stazione, 00015 Rome, Italy.
Materials (Basel). 2021 Apr 4;14(7):1780. doi: 10.3390/ma14071780.
Pressure sensors based on diamond membranes were designed and tested for gas pressure measurement up to 6.8 MPa. The diamond film (2" diameter, 6 μm thickness)-grown by microwave plasma chemical vapor deposition on a silicon substrate-was a starting material to produce an array of membranes with different diameters in the 130-400 μm range, in order to optimize the sensor performance. Each 5 mm × 5 mm sensing element was obtained by subsequent silicon slicing. The fixed film thickness, full-scale pressure range, and sensor sensitivity were established by a proper design of the diameter of diamond membrane which represents the sensing element for differential pressure measurement. The pressure-induced deflection of the membrane was optically measured using a Fabry-Pérot interferometer formed by a single mode optical fiber front surface and the deflecting diamond film surface. The optical response of the system was numerically simulated using geometry and the elastic properties of the diamond diaphragm, and was compared with the experiments. Depending on the diamond membrane's diameter, the fabricated sensors displayed a good modulation depth of response over different full-scale ranges, from 3 to 300 bar. In view of the excellent mechanical, thermal, and chemical properties of diamond, such pressure sensors could be useful for performance in a harsh environment.
基于金刚石膜的压力传感器被设计并测试用于高达6.8兆帕的气体压力测量。通过微波等离子体化学气相沉积在硅衬底上生长的金刚石膜（直径2英寸，厚度6微米）是生产一系列直径在130 - 400微米范围内不同的膜的起始材料，以便优化传感器性能。每个5毫米×5毫米的传感元件通过后续的硅切片获得。通过对代表差压测量传感元件的金刚石膜直径进行适当设计，确定了固定的膜厚度、满量程压力范围和传感器灵敏度。使用由单模光纤前表面和偏转的金刚石膜表面形成的法布里 - 珀罗干涉仪对膜的压力诱导偏转进行光学测量。使用金刚石膜片的几何形状和弹性特性对系统的光学响应进行了数值模拟，并与实验进行了比较。根据金刚石膜的直径，制造的传感器在3至300巴的不同满量程范围内显示出良好的响应调制深度。鉴于金刚石具有优异的机械、热和化学性能，这种压力传感器在恶劣环境中可能具有良好的性能表现。
