State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, China.
College of Information Technology, Jilin Agricultural University, 2888 Xincheng Street, Changchun 130118, China.
Sensors (Basel). 2019 Nov 19;19(22):5038. doi: 10.3390/s19225038.
In this paper, we present and analyze a compact inner-wall grating slot microring resonator (IG-SMRR) with the footprint of less than 13 μm × 13 μm on the silicon-on-insulator (SOI) platform for label-free sensing, which comprises a slot microring resonator (SMRR) and inner-wall grating (IG). Its detection range is significantly enhanced without the limitation of the free spectral region (FSR) owing to the combination of SMRR and IG. The IG-SMRR has an ultra-large quasi-FSR of 84.5 nm as the detection range, and enlarged factor is up to over 3 compared with the conventional SMRR. The concentration sensitivities of sodium chloride solutions and D-glucose solutions are 996.91 pm/% and 968.05 pm/%, respectively, and the corresponding refractive index (RI) sensitivities are 559.5 nm/RIU (refractive index unit) and 558.3 nm/RIU, respectively. The investigation on the combination of SMRR and IG is a valuable exploration of label-free sensing application for ultra-large detection range and ultra-high sensitivity in future.
本文提出并分析了一种紧凑的内壁光栅槽微环谐振器（IG-SMRR），其在硅衬底上的 footprint 小于 13 μm × 13 μm，用于无标记传感，它由槽微环谐振器（SMRR）和内壁光栅（IG）组成。由于 SMRR 和 IG 的结合，其检测范围得到了显著增强，而不受自由光谱区（FSR）的限制。IG-SMRR 的超宽准 FSR 为 84.5nm，作为检测范围，与传统的 SMRR 相比，放大因子高达 3 以上。氯化钠溶液和 D-葡萄糖溶液的浓度灵敏度分别为 996.91 pm/%和 968.05 pm/%，相应的折射率（RI）灵敏度分别为 559.5nm/RIU（折射率单位）和 558.3nm/RIU。SMRR 和 IG 的结合是对未来超宽检测范围和超高灵敏度无标记传感应用的有价值的探索。
