Sidewall grating slot waveguide microring resonator biochemical sensor.

Integrated microring resonator structures based on silicon-on-insulator (SOI) platforms are promising candidates for high-performance on-chip sensing. In this work, a novel sidewall grating slot microring resonator (SG-SMRR) with a compact size (5 µm center radius) based on the SOI platform is proposed and demonstrated experimentally. The experiment results show that the refractive index (RI) sensitivity and the limit of detection value are 620 nm/RIU and 1.4 × 10 RIU, respectively. The concentration sensitivity and minimum concentration detection limit are 1120 pm/% and 0.05%, respectively. Moreover, the sidewall grating structure makes this sensor free of free spectral range (FSR) limitation. The detection range is significantly enlarged to 84.5 nm in lab measurement, four times that of the FSR of conventional SMRRs. The measured Q-factor is 3.1 × 10, and the straight slot waveguide transmission loss is 24.2 dB/cm under sensing conditions. These results combined with the small form factor associated with a silicon photonics sensor open up applications where high sensitivity and large measurement range are essential.