Chen Xiaoyu, Xia Yuyu, Mao Yifei, Huang Yun, Zhu Jia, Xu Jun, Zhu Rui, Shi Lei, Wu Wengang
National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China.
Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China.
Micromachines (Basel). 2020 Jan 16;11(1):95. doi: 10.3390/mi11010095.
Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D meta-atom arrays, the increasing demand for more efficient and more precise nanofabrication methods has encountered challenges. To explore better fabrication methods, we presented a programmable nanofabrication method for a complex 3D meta-atom array based on focused-ion-beam stress-induced deformation (FIB-SID) effect and designed a distinctive nanostructure array composed of periodic 3D meta-atoms to demonstrate the presented method. After successful fabrication of the designed 3D meta-atom arrays, measurements were conducted to investigate the electric/magnetic field properties and infrared spectral characteristics using scanning cathodoluminescence (CL) microscopic imaging and Fourier transform infrared (FTIR) spectroscopy, which revealed a certain excitation mode induced by polarized incident IR light near 8 μm. Besides the programmability for complex 3D meta-atoms and wide applicability of materials, a more significant advantage of the method is that a large-scale array composed of complex 3D meta-atoms can be processed in a quasi-parallel way, which improves the processing efficiency and the consistency of unit cells dramatically.
由于其独特的电磁特性，超原子阵列一直是实现各种特定功能的热点，近年来对超原子结构的研究已从二维（2D）扩展到三维（3D）。随着对复杂3D超原子阵列的不断追求，对更高效、更精确的纳米制造方法的需求不断增加，这遇到了挑战。为了探索更好的制造方法，我们提出了一种基于聚焦离子束应力诱导变形（FIB-SID）效应的复杂3D超原子阵列的可编程纳米制造方法，并设计了一种由周期性3D超原子组成的独特纳米结构阵列来演示所提出的方法。在成功制造出设计的3D超原子阵列后，使用扫描阴极发光（CL）显微镜成像和傅里叶变换红外（FTIR）光谱进行测量，以研究电场/磁场特性和红外光谱特征，结果揭示了在8μm附近由偏振入射红外光诱导的某种激发模式。除了对复杂3D超原子的可编程性和材料的广泛适用性外，该方法的一个更显著优点是可以以准并行方式处理由复杂3D超原子组成的大规模阵列，这极大地提高了处理效率和单元的一致性。
