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使用带有倾斜旋转样品架的5毫米紫外发光二极管集成系统进行3D微光刻。

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder.

作者信息

Shiba Sabera Fahmida, Jeon Hyeongmin, Kim Jong-Soo, Kim Jong-Eun, Kim Jungkwun

机构信息

Department of Electrical and Computer Engineering, Kansas State University, Manhattan, KS 66506, USA.

Samil Tech Co., LTD, Bucheon-si 14441, Korea.

出版信息

Micromachines (Basel). 2020 Jan 31;11(2):157. doi: 10.3390/mi11020157.

DOI:10.3390/mi11020157
PMID:32024035
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7074750/
Abstract

This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix of such 5 mm UV-LEDs giving a total number of 400 LEDs which makes it a very favorable source with a large area for having a batch production of the desired microstructures. This light source is able to give a level of precision in microfabrication which cannot be obtained using commercial 3D printers. The whole light source performs continuous rotational movement once it is turned on. This can also move up and down in a vertical direction. This multidirectional light source also comprises a multidirectional sample holder. The light source teaming up with the multidirectional sample holder highly facilitates the process of fabrication of a huge range of 3D structures. This article also describes the different levels of characterization of the system and demonstrates several fabricated 3D microstructures including high aspect ratio vertical micro towers, twisted turbine structures, triangles, inclined pillar 'V' structures, and hollow horn structures as well.

摘要

本文展示了一种三维微光刻系统，其中由5毫米紫外发光二极管（UV-LED）阵列充当光源。光源单元是一个UV-LED，其长度约为8.9毫米，直径为5毫米。整个光源由20×20的这种5毫米UV-LED矩阵组成，共有400个LED，这使其成为用于批量生产所需微结构的大面积的非常理想的光源。该光源能够在微制造中提供使用商用3D打印机无法获得的精度水平。整个光源一旦开启就进行连续的旋转运动。它还可以在垂直方向上上下移动。这种多向光源还包括一个多向样品架。光源与多向样品架配合极大地促进了大量三维结构的制造过程。本文还描述了该系统的不同表征水平，并展示了几种制造的三维微结构，包括高纵横比的垂直微塔、扭曲的涡轮结构、三角形、倾斜柱“V”结构以及空心喇叭结构。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/f6e750cef0a3/micromachines-11-00157-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/6c93c0dd49cc/micromachines-11-00157-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/2dcc5e9a0146/micromachines-11-00157-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/8d2f04716e72/micromachines-11-00157-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/938728a19e7e/micromachines-11-00157-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/7f286c30383e/micromachines-11-00157-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/280398d50234/micromachines-11-00157-g006a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/d82496fa68e4/micromachines-11-00157-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/78437ee7e755/micromachines-11-00157-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/f6e750cef0a3/micromachines-11-00157-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/6c93c0dd49cc/micromachines-11-00157-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/2dcc5e9a0146/micromachines-11-00157-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/8d2f04716e72/micromachines-11-00157-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/938728a19e7e/micromachines-11-00157-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/7f286c30383e/micromachines-11-00157-g005a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/280398d50234/micromachines-11-00157-g006a.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/d82496fa68e4/micromachines-11-00157-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/78437ee7e755/micromachines-11-00157-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0313/7074750/f6e750cef0a3/micromachines-11-00157-g009.jpg

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