Department of Physics, University of Alberta, Edmonton, AB T6G 2E1, Canada.
National Research Council of Canada, 11421 Saskatchewan Dr NW, Edmonton, AB T6G 2M9, Canada.
Int J Mol Sci. 2020 Feb 2;21(3):984. doi: 10.3390/ijms21030984.
We report a highly compliant process for patterning nanoparticle arrays on micro- and nanomechanical devices. The distinctive step involves the single layer self-assembled nanoparticles on top of released nanomechanical devices. We demonstrate the process by fabricating sizable arrays of nanomechanical devices on silicon-on-insulator substrates, acting as nanomechanical torque magnetometers. Later, the nanoparticles were self-assembled in geometrical shapes on top of the devices by a unique combination of top-down and bottom-up methods. The self-assembled array of nanoparticles successfully showed a magnetic torque signal by magnetic actuation of the magnetometer. This patterning process can be generalized for any shape and for a wide range of nanoparticles on the nanomechanical resonators.
我们报告了一种在微纳机械器件上图案化纳米粒子阵列的高顺应性工艺。独特的步骤涉及到在释放的纳机械器件顶部的单层自组装纳米粒子。我们通过在绝缘体上硅衬底上制造大量的纳机械器件阵列来证明这一过程，这些器件充当纳机械扭矩磁强计。之后，通过自上而下和自下而上的独特组合方法，在器件顶部将纳米粒子自组装成各种几何形状。通过磁强计的磁激励，成功地显示出自组装纳米粒子阵列的磁扭矩信号。这种图案化工艺可以推广到纳机械谐振器上的任何形状和各种纳米粒子。
