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用于缓解高精度电容式MEMS加速度计中键合引起的翘曲的温度梯度方法

Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.

作者信息

Liu Dandan, Liu Huafeng, Liu Jinquan, Hu Fangjing, Fan Ji, Wu Wenjie, Tu Liangcheng

机构信息

MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China.

Institute of Geophysics and PGMF, Huazhong University of Science and Technology, Wuhan 430074, China.

出版信息

Sensors (Basel). 2020 Feb 21;20(4):1186. doi: 10.3390/s20041186.

DOI:10.3390/s20041186
PMID:32098077
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7071001/
Abstract

Capacitive MEMS accelerometers with area-variable periodic-electrode displacementtransducers found wide applications in disaster monitoring, resource exploration and inertialnavigation. The bonding-induced warpage, due to the difference in the coefficients of thermalexpansion of the bonded slices, has a negative influence on the precise control of the interelectrodespacing that is essential to the sensitivity of accelerometers. In this work, we propose the theory,simulation and experiment of a method that can alleviate both the stress and the warpage byapplying different bonding temperature on the bonded slices. A quasi-zero warpage is achievedexperimentally, proving the feasibility of the method. As a benefit of the flat surface, the spacing ofthe capacitive displacement transducer can be precisely controlled, improving the self-noise of theaccelerometer to 6 ng/√Hz @0.07 Hz, which is about two times lower than that of the accelerometerusing a uniform-temperature bonding process.

摘要

具有面积可变周期性电极位移传感器的电容式微机电系统加速度计在灾害监测、资源勘探和惯性导航中有着广泛应用。由于键合片热膨胀系数不同而导致的键合引起的翘曲，对电极间距的精确控制产生负面影响，而电极间距对于加速度计的灵敏度至关重要。在这项工作中，我们提出了一种理论、模拟和实验方法，该方法通过对键合片施加不同的键合温度来减轻应力和翘曲。通过实验实现了准零翘曲，证明了该方法的可行性。得益于平面表面，电容式位移传感器的间距可以精确控制，将加速度计的自噪声在0.07 Hz时提高到6 ng/√Hz，这比采用恒温键合工艺的加速度计低约两倍。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/33be9e315400/sensors-20-01186-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/99debd233213/sensors-20-01186-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/6af0926776dd/sensors-20-01186-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/6aa99dac5671/sensors-20-01186-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/66cfa04e4964/sensors-20-01186-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/fe023024db61/sensors-20-01186-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/9d9ed79d92bd/sensors-20-01186-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/ce726c4d214c/sensors-20-01186-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/a05f62c23f58/sensors-20-01186-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/a46633b90158/sensors-20-01186-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/33be9e315400/sensors-20-01186-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/99debd233213/sensors-20-01186-g0A1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/6af0926776dd/sensors-20-01186-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/6aa99dac5671/sensors-20-01186-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/66cfa04e4964/sensors-20-01186-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/fe023024db61/sensors-20-01186-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/9d9ed79d92bd/sensors-20-01186-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/ce726c4d214c/sensors-20-01186-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/a05f62c23f58/sensors-20-01186-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/a46633b90158/sensors-20-01186-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a656/7071001/33be9e315400/sensors-20-01186-g009.jpg

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本文引用的文献

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Measurement of the Earth tides with a MEMS gravimeter.用 MEMS 重力仪测量地球潮汐。
Nature. 2016 Mar 31;531(7596):614-7. doi: 10.1038/nature17397.
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Major improvements of quartz crystal pulling sensitivity and linearity using series reactance.采用串联电抗提高石英晶体提拉灵敏度和线性度。
一种控制和降低键合晶圆翘曲及残余应力的新方法。
Micromachines (Basel). 2021 Mar 26;12(4):361. doi: 10.3390/mi12040361.
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