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三维金属与层状SnS之间的电接触势垒

Electrical Contact Barriers between a Three-Dimensional Metal and Layered SnS.

作者信息

Lv Chengzhai, Yan Wenjie, Shieh Tung-Ho, Zhao Yue, Wu Gang, Zhao Yanfeng, Lv Yanhui, Zhang Duan, Chen Yanhui, Arora Sunil K, Ó Coileáin Cormac, Chang Ching-Ray, Cheng Hung Hsiang, Hung Kuan-Ming, Wu Han-Chun

机构信息

School of Physics, Beijing Institute of Technology, Beijing 100081, P. R. China.

Department of Computer and Communication, Kun Shan University, Tainan 710, Taiwan, ROC.

出版信息

ACS Appl Mater Interfaces. 2020 Apr 1;12(13):15830-15836. doi: 10.1021/acsami.9b21996. Epub 2020 Mar 17.

Abstract

Field-effect transistors derived from traditional 3D semiconductors are rapidly approaching their fundamental limits. Layered semiconducting materials have emerged as promising candidates to replace restrictive 3D semiconductor materials. However, contacts between metals and layered materials deviate from Schottky-Mott behavior when determined by transport methods, while X-ray photoelectron spectroscopy measurements suggest that the contacts should be at the Schottky limit. Here, we present a systematic investigation on the influence of metal selection when electrically contacting SnS, a layered metal dichalcogenide semiconductor with the potential to replace silicon. It is found that the electrically measured barrier height depends also weakly on the work function of the metal contacts with slopes of 0.09 and -0.34 for n-type and p-type Schottky contacts, respectively. Based on the Kirchhoff voltage law and considering a current path induced by metallic defects, we found that the Schottky barrier still follows the Schottky-Mott limits and the electrically measured barrier height mainly originates from the van der Waals gap between the metal and SnS, and the slope depends on the magnitude of the van der Waals capacitance.

摘要

源自传统三维半导体的场效应晶体管正迅速接近其基本极限。层状半导体材料已成为有望取代受限三维半导体材料的候选材料。然而,当通过输运方法确定时,金属与层状材料之间的接触偏离了肖特基 - 莫特行为,而X射线光电子能谱测量表明接触应处于肖特基极限。在此,我们对与具有取代硅潜力的层状金属二硫属化物半导体SnS进行电接触时金属选择的影响进行了系统研究。结果发现,电测量的势垒高度也微弱地依赖于金属接触的功函数,对于n型和p型肖特基接触,斜率分别为0.09和 -0.34。基于基尔霍夫电压定律并考虑由金属缺陷引起的电流路径,我们发现肖特基势垒仍遵循肖特基 - 莫特极限,并且电测量的势垒高度主要源于金属与SnS之间的范德华间隙,且斜率取决于范德华电容的大小。

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