Berujon Sebastien, Cojocaru Ruxandra, Piault Pierre, Celestre Rafael, Roth Thomas, Barrett Raymond, Ziegler Eric
European Synchrotron Radiation Facility, CS 40220, F-38043 Grenoble Cedex 9, France.
J Synchrotron Radiat. 2020 Mar 1;27(Pt 2):284-292. doi: 10.1107/S1600577520000491. Epub 2020 Feb 20.
X-ray near-field speckle-based phase-sensing approaches provide efficient means of characterizing optical elements. Presented here is a theoretical review of several of these speckle methods within the framework of optical characterization, and a generalization of the concept is provided. As is also demonstrated experimentally in a parallel paper [Berujon, Cojocaru, Piault, Celestre, Roth, Barrett & Ziegler (2020), J. Synchrotron Rad. 27, (this issue)], the methods theoretically developed here can be applied to different beams and optics and within a variety of situations where at-wavelength metrology is desired. By understanding the differences between the various processing methods, it is possible to find and implement the most suitable approach for each metrology scenario.
基于X射线近场散斑的相位传感方法为光学元件的表征提供了有效的手段。本文在光学表征框架内对其中几种散斑方法进行了理论综述,并对该概念进行了推广。正如在一篇平行论文[贝鲁琼、科乔卡鲁、皮亚尔特、塞莱斯特、罗斯、巴雷特和齐格勒(2020年),《同步辐射杂志》27卷,(本期)]中通过实验所证明的那样,这里理论上开发的方法可以应用于不同的光束和光学器件,以及在需要波长计量的各种情况下。通过了解各种处理方法之间的差异,有可能为每个计量场景找到并实施最合适的方法。