通过气体团簇离子轰击在ZnO平面衬底和纳米棒上形成纳米波纹。

Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment.

作者信息

Zeng Xiaomei, Pelenovich Vasiliy, Xing Bin, Rakhimov Rakhim, Zuo Wenbin, Tolstogouzov Alexander, Liu Chuansheng, Fu Dejun, Xiao Xiangheng

机构信息

Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, China.

School of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, China.

出版信息

Beilstein J Nanotechnol. 2020 Feb 24;11:383-390. doi: 10.3762/bjnano.11.29. eCollection 2020.

DOI:10.3762/bjnano.11.29

PMID:32175218

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7059505/

Abstract

In the present study Ar cluster ions accelerated by voltages in the range of 5-10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30-70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates.

摘要

在本研究中，使用5-10 kV电压加速的Ar团簇离子辐照单晶ZnO衬底和纳米棒，以制备自组装表面纳米波纹阵列。当团簇束的入射角在30-70°范围内时，观察到波纹的形成。研究了入射角、加速电压和注量对波纹形成的影响。对于两种靶材，纳米波纹的波长和高度都随着加速电压和注量的增加而增加。在平坦衬底上形成的纳米波纹让人联想到风成沙波纹。在高离子注量下纳米棒晶面上形成的波纹类似于排列有序的平行台阶或肋条。与平坦衬底的准无限表面相比，纳米棒上更有序的波纹形成可能与纳米棒晶面的限制有关。