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封装对压电微机电超声换能器性能的影响——多物理场模型与频率分析

On the Effects of Package on the PMUTs Performances-Multiphysics Model and Frequency Analyses.

作者信息

Massimino Gianluca, Colombo Alessandro, Ardito Raffaele, Quaglia Fabio, Corigliano Alberto

机构信息

Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy.

Analog, MEMS & Sensors Group, ST Microelectronics, Via Tolomeo 1, 20010 Cornaredo, Italy.

出版信息

Micromachines (Basel). 2020 Mar 14;11(3):307. doi: 10.3390/mi11030307.

DOI:10.3390/mi11030307
PMID:32183377
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7143486/
Abstract

This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses, which determine a geometrically non-linear initial deformed configuration of the diaphragms and a remarkable shift of the fundamental frequency; the multiple coupling between different physics, namely electro-mechanical-coupling for the piezo-electric model, acoustic-structure interaction at the acoustic-structure interface and pressure acoustics in the surrounding air. The model takes into account the complete set of PMUTs belonging to the silicon die in a 4 x 4 array configuration and the protective package, as well. The results have been validated by experimental data, in terms of initial static pre-deflected configuration of the diaphragms and frequency response function of the PMUT. The numerical procedure was applied, to analyze different package configurations of the device, to study the influence of the holes on the acoustic transmission in terms of SPL and propagation pattern and consequently extract a set of design guidelines.

摘要

本文通过有限元方法（FEM）对空气耦合阵列压电微机电超声换能器（PMUT）进行多物理场数值建模。所提出的数值模型是全三维的，具有以下特点：存在制造引起的残余应力，这决定了膜片的几何非线性初始变形构型以及基频的显著偏移；不同物理场之间的多重耦合，即压电模型中的机电耦合、声-结构界面处的声-结构相互作用以及周围空气中的压力声学。该模型考虑了以4×4阵列配置属于硅芯片的完整PMUT集以及保护封装。结果已通过实验数据进行了验证，涉及膜片的初始静态预偏转构型和PMUT的频率响应函数。应用该数值程序来分析器件的不同封装配置，研究孔对声压级（SPL）和声传播模式方面的声传输的影响，从而提取出一套设计准则。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/670549cf491f/micromachines-11-00307-g030.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/e036cf661aa8/micromachines-11-00307-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/dad6ed7fc392/micromachines-11-00307-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/fb16eab35e86/micromachines-11-00307-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/2e1d2dc87094/micromachines-11-00307-g022.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/7c01aa2caad9/micromachines-11-00307-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/3698b9916843/micromachines-11-00307-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/642b22a0b905/micromachines-11-00307-g025.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/57615638a512/micromachines-11-00307-g026.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/00e84a058c56/micromachines-11-00307-g027.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/5f57b4872894/micromachines-11-00307-g028.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/66220ec0c4a9/micromachines-11-00307-g029.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/670549cf491f/micromachines-11-00307-g030.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/e036cf661aa8/micromachines-11-00307-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/dad6ed7fc392/micromachines-11-00307-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/fb16eab35e86/micromachines-11-00307-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/2e1d2dc87094/micromachines-11-00307-g022.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/7c01aa2caad9/micromachines-11-00307-g023.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/3698b9916843/micromachines-11-00307-g024.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/642b22a0b905/micromachines-11-00307-g025.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/57615638a512/micromachines-11-00307-g026.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/00e84a058c56/micromachines-11-00307-g027.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/5f57b4872894/micromachines-11-00307-g028.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/66220ec0c4a9/micromachines-11-00307-g029.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/34d9/7143486/670549cf491f/micromachines-11-00307-g030.jpg

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本文引用的文献

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