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各种环境下压电微机电系统超声换能器阵列的高效建模与仿真

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients.

作者信息

Abdalla Omer M O, Massimino Gianluca, Savoia Alessandro Stuart, Quaglia Fabio, Corigliano Alberto

机构信息

Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy.

Dipartimento di Ingegneria Industriale, Elettronica e Meccanica, Università degli Studi Roma Tre, Via della Vasca Navale 84, 00146 Roma, Italy.

出版信息

Micromachines (Basel). 2022 Jun 18;13(6):962. doi: 10.3390/mi13060962.

DOI:10.3390/mi13060962
PMID:35744576
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9227387/
Abstract

This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number of transducers allows for a large reduction in computational cost without reducing accuracy. The modeling idea is based on coupling shell elements applied to the PMUT structural layers with 3D-solid elements applied to the piezoelectric layer. A set of eigenfrequency and frequency domain analyses are presented considering a single ROM of a PMUT performing in different ambients and the performing central frequencies are obtained for every considered scenario. A unique arrangement of 228 PMUTs is presented and tested for its ability to transmit and receive acoustic waves. The operating frequency band of the array and the level of interference and cross-talk among different PMUTs in the near field are estimated. Finally, the results from a preliminary experimental test performed to analyze the acoustic abilities of an 8 × 8 array of PMUTs are presented. A corresponding numerical model is created and the obtained results matched the experimental data, leading to a validation of the modeling technique proposed in this work.

摘要

本文提出了一种用于压电微机械超声换能器（PMUT）复杂多层阵列的数值降阶建模（ROM）方法。所采用的用于生成由大量换能器组成的PMUT阵列的数值建模技术，能够在不降低精度的情况下大幅降低计算成本。建模思路基于将应用于PMUT结构层的壳单元与应用于压电层的三维实体单元相耦合。针对在不同环境中工作的单个PMUT的ROM进行了一组本征频率和频域分析，并针对每个考虑的场景获得了工作中心频率。展示了228个PMUT的独特排列，并对其发射和接收声波的能力进行了测试。估计了阵列的工作频带以及近场中不同PMUT之间的干扰和串扰水平。最后，展示了为分析8×8 PMUT阵列的声学能力而进行的初步实验测试结果。创建了相应的数值模型，所获得的结果与实验数据相匹配，从而验证了本文提出的建模技术。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/74d33587aa5c/micromachines-13-00962-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/0004a03d9824/micromachines-13-00962-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/956c3d715d85/micromachines-13-00962-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/2a5b69177458/micromachines-13-00962-g006.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/e1ab815eb286/micromachines-13-00962-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/15a186061506/micromachines-13-00962-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/71f2d955ccd2/micromachines-13-00962-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/33e15cdea6e8/micromachines-13-00962-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/8f6b9d2b132a/micromachines-13-00962-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/54a5278e1fac/micromachines-13-00962-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/74d33587aa5c/micromachines-13-00962-g021.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/0004a03d9824/micromachines-13-00962-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/509bdfc5b085/micromachines-13-00962-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/8854be9c9386/micromachines-13-00962-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/17fbecda199e/micromachines-13-00962-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/956c3d715d85/micromachines-13-00962-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/2a5b69177458/micromachines-13-00962-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/6dd8bde9731e/micromachines-13-00962-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/1444ea23020d/micromachines-13-00962-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/e1ab815eb286/micromachines-13-00962-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/15a186061506/micromachines-13-00962-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/71f2d955ccd2/micromachines-13-00962-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/33e15cdea6e8/micromachines-13-00962-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/8f6b9d2b132a/micromachines-13-00962-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/54a5278e1fac/micromachines-13-00962-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/858f853d08e7/micromachines-13-00962-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/beb827d7d141/micromachines-13-00962-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/cd80d3358717/micromachines-13-00962-g017.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/07c88bf7cd9d/micromachines-13-00962-g018.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/f780ea4fef63/micromachines-13-00962-g019.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/4cfb4a569fc3/micromachines-13-00962-g020.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5937/9227387/74d33587aa5c/micromachines-13-00962-g021.jpg

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Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array.使用 PZT 压电器件微机械超声换能器阵列对固体缺陷进行全聚焦超声成像。
IEEE Trans Ultrason Ferroelectr Freq Control. 2021 Apr;68(4):1380-1386. doi: 10.1109/TUFFC.2020.3032988. Epub 2021 Mar 26.
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On the Effects of Package on the PMUTs Performances-Multiphysics Model and Frequency Analyses.
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