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一种基于多晶硅电阻的具有9位逐次逼近寄存器（SAR）和精细延迟线的时域CMOS温度传感器。

A Poly Resistor Based Time Domain CMOS Temperature Sensor with 9b SAR and Fine Delay Line.

作者信息

Xu Zhiwei, Byun Sangjin

机构信息

Division of Electronics and Electrical Engineering, Dongguk University, Seoul 04620, Korea.

出版信息

Sensors (Basel). 2020 Apr 6;20(7):2053. doi: 10.3390/s20072053.

DOI:10.3390/s20072053
PMID:32268513
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7180752/
Abstract

This paper presents a new type of time domain CMOS temperature sensor with a 9b successive approximation register (SAR) control logic and a fine delay line. We adopted an N-type poly resistor as the sensing element for temperature linearity. The chip was implemented in a standard 0.18 m 1P6M bulk CMOS process with general V transistors and the active die area was 0.432 mm. The temperature resolution was 0.49 °C and the temperature error was from -1.6 to +0.6 °C over the range of 0 to 100 °C after two-point calibration. The supply voltage sensitivity was 0.085 °C/mV. The conversion rate was 25kHz and the energy efficiency was 7.2 nJ/sample.

摘要

本文介绍了一种新型的时域CMOS温度传感器，它具有9位逐次逼近寄存器（SAR）控制逻辑和精细延迟线。我们采用N型多晶硅电阻作为温度线性的传感元件。该芯片采用标准的0.18μm 1P6M体CMOS工艺，使用普通的V晶体管实现，有源芯片面积为0.432平方毫米。经过两点校准后，在0至100°C的温度范围内，温度分辨率为0.49°C，温度误差为-1.6至+0.6°C。电源电压灵敏度为0.085°C/mV。转换速率为25kHz，能量效率为7.2 nJ/样本。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/0ab70fd3cb48/sensors-20-02053-g017.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/90177f8903d5/sensors-20-02053-g014.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/3f34951d72c8/sensors-20-02053-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/0ab70fd3cb48/sensors-20-02053-g017.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/fd6db2e6071c/sensors-20-02053-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/237e48ae7dc8/sensors-20-02053-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/4446c4ea761f/sensors-20-02053-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/6104161e0cb6/sensors-20-02053-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/0381430e03a8/sensors-20-02053-g013.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/8a871588d6e2/sensors-20-02053-g015.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/3f34951d72c8/sensors-20-02053-g016.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/174c/7180752/0ab70fd3cb48/sensors-20-02053-g017.jpg

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本文引用的文献

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