Afyouni Akbari Shirin, Ghafarinia Vahid, Larsen Tom, Parmar Marsha M, Villanueva Luis Guillermo
Isfahan University of Technology (IUT), Isfahan, Iran.
Advanced NEMS Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland.
Sci Rep. 2020 Apr 14;10(1):6426. doi: 10.1038/s41598-020-63562-y.
In this paper ultra clean monolayer and bilayer Chemical Vapor Deposited (CVD) graphene membranes with diameters up to 500 µm and 750 µm, respectively have been fabricated using Inverted Floating Method (IFM) followed by thermal annealing in vacuum. The yield decreases with size but we show the importance of choosing a good graphene raw material. Dynamic mechanical properties of the membranes at room temperature in different diameters are measured before and after annealing. The quality factor ranges from 200 to 2000 and shows no clear dependence on the size. The resonance frequency is inversely proportional to the diameter of the membranes. We observe a reduction of the effective intrinsic stress in the graphene, as well as of the relative error in the determination of said stress after thermal annealing. These measurements show that it is possible to produce graphene membranes with reproducible and excellent mechanical properties.
在本文中，分别采用倒置漂浮法（IFM）并随后在真空中进行热退火，制备了直径分别达500 µm和750 µm的超洁净单层和双层化学气相沉积（CVD）石墨烯膜。产率随尺寸减小，但我们展示了选择优质石墨烯原材料的重要性。在退火前后测量了不同直径的膜在室温下的动态力学性能。品质因数范围为200至2000，且未表现出对尺寸的明显依赖性。共振频率与膜的直径成反比。我们观察到石墨烯中有效本征应力的降低，以及热退火后所述应力测定中相对误差的降低。这些测量结果表明，有可能制备出具有可重现且优异力学性能的石墨烯膜。
