Fan Xuge, Moreno-Garcia Daniel, Ding Jie, Gylfason Kristinn B, Villanueva Luis Guillermo, Niklaus Frank
Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing 100081, China.
Division of Micro and Nanosystems, School of Electrical Engineering and Computer Science, KTH Royal Institute of Technology, SE-10044 Stockholm, Sweden.
ACS Appl Nano Mater. 2023 Dec 1;7(1):102-109. doi: 10.1021/acsanm.3c03642. eCollection 2024 Jan 12.
The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.
石墨烯独特的机械和电学特性使其成为用于纳米机电系统（NEMS）的一种令人兴奋的材料。带有石墨烯弹簧的NEMS谐振器有助于研究石墨烯的基本材料特性，从而为诸如传感器等应用实现创新的器件概念。在此，我们展示了具有双层石墨烯制成的带状弹簧和硅制成的验证质量块的谐振换能器，并通过激光多普勒振动测量法研究了它们在空气中和真空中共振时的非线性力学特性。令人惊讶的是，根据石墨烯弹簧的设计，我们在共振时观察到了弹簧变硬和弹簧变软现象。在真空中测量的谐振器品质因数在150至350之间。这些结果通过有助于理解基于带有附加验证质量块的石墨烯带的换能器的动力学特性，为一类超小型纳米机械传感器（如加速度计）铺平了道路。
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