Chen Jin-Xin, Li Xiao-Xi, Huang Wei, Ji Zhi-Gang, Wu Su-Zhen, Xiao Zhi-Qiang, Ou Xin, Zhang David Wei, Lu Hong-Liang
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
Nanotechnology. 2020 Aug 21;31(34):345206. doi: 10.1088/1361-6528/ab925d. Epub 2020 May 12.
The effects of x-ray irradiation on the mechanically exfoliated quasi-two-dimensional (quasi-2D) β-GaO nanoflake field-effect transistors (FETs) under the condition of biasing voltage were systematically investigated for the first time. It has been revealed that the device experienced two stages during irradiation. At low ionizing doses (<240 krad), the device performance is mainly influenced by the photo-effect and the subsequent persistent photocurrent (PPC) effect as a result of the pre-existing electron traps (e-trap) in the oxides far away from the SiO/β-GaO interface. At larger doses (>240 krad), the device characteristics are dominated by the radiation-induced structural or compositional deterioration. The newly-generated e-traps are found located at the SiO/β-GaO interface. This study shed light on the future radiation-tolerant device fabrication process development, paving a way towards the feasibility and practicability of β-GaO-based devices in extreme-environment applications.
首次系统研究了X射线辐照对处于偏置电压条件下的机械剥离准二维(准2D)β-GaO纳米片场效应晶体管(FET)的影响。结果表明,该器件在辐照过程中经历了两个阶段。在低电离剂量(<240 krad)下,器件性能主要受光效应以及远离SiO/β-GaO界面的氧化物中预先存在的电子陷阱(e陷阱)导致的后续持久光电流(PPC)效应影响。在较大剂量(>240 krad)下,器件特性主要由辐射诱导的结构或成分劣化主导。发现新产生的e陷阱位于SiO/β-GaO界面处。这项研究为未来耐辐射器件制造工艺的发展提供了启示,为基于β-GaO的器件在极端环境应用中的可行性和实用性铺平了道路。