Xi Xiang, Chen Zefeng, Xu Jian-Bin, Sun Xiankai
Opt Express. 2020 May 11;28(10):14386-14395. doi: 10.1364/OE.382770.
Micro- and nano-optomechanics has attracted broad interest for applications of mechanical sensing and coherent signal processing. For nonpiezoelectric materials such as silicon or silicon nitride, electrocapacitive effects with metals patterned on mechanical structures are usually adopted to actuate the mechanical motion of the micro- or nanomechanical devices. However, the metals have deleterious effects on the mechanical structures because they add an additional weight and also introduce considerable mechanical losses. To solve these problems, we have proposed and experimentally demonstrated a new scheme of electro-optomechanical integration on a silicon-on-insulator platform by using single-layer graphene as a highly conductive coating for electromechanical actuation. Mechanical modes of different groups were electrically actuated and optically detected in a micromechanical resonator, with the mechanical Q > 1000 measured in air. Compatible with CMOS technology, our scheme is suitable for large-scale electro-optomechanical integration and will have wide applications in high-speed sensing, communication, and signal processing.
微纳光机械学在机械传感和相干信号处理应用方面引起了广泛关注。对于诸如硅或氮化硅等非压电材料，通常采用在机械结构上图案化金属的电容效应来驱动微纳机械装置的机械运动。然而，金属对机械结构有有害影响，因为它们增加了额外的重量，还引入了相当大的机械损耗。为了解决这些问题，我们提出并通过实验证明了一种在绝缘体上硅平台上进行电光机械集成的新方案，该方案使用单层石墨烯作为用于机电驱动的高导电涂层。在微机械谐振器中，不同组的机械模式通过电驱动并进行光学检测，在空气中测得的机械品质因数Q>1000。我们的方案与CMOS技术兼容，适用于大规模电光机械集成，并将在高速传感、通信和信号处理中得到广泛应用。
