Wei Chaoran, Ito Yusuke, Shinomoto Rin, Nagato Keisuke, Sugita Naohiko
Opt Express. 2020 May 11;28(10):15240-15249. doi: 10.1364/OE.390289.
In accordance with the increasing demand for high-speed processing, the repetition rate of ultrashort pulse lasers has continued to increase. With the development of these lasers, there is a growing demand for the prediction of shapes processed at high repetition rates. However, the prediction of these shapes is a major challenge, because of the difficulty associated with the estimation of heat accumulation. In this study, we developed a simulation of ultrashort laser drilling in glass including heat accumulation calculation between pulses. In this simulation model, temperature is considered as an additional criterion of material removal, thus, the dependency of the repetition rate can be estimated. Two model parameters of laser absorption at high temperatures are investigated and determined by experiments under high environmental temperatures. Using the simulation model, high shape-prediction accuracy at high repetition rates was achieved and validated by comparison with experiments. This study may contribute to broadening the applications of high-repetition-rate ultrashort pulse lasers.
随着对高速处理的需求不断增加，超短脉冲激光器的重复频率持续提高。随着这些激光器的发展，对高重复频率下加工形状预测的需求也日益增长。然而，这些形状的预测是一项重大挑战，因为与热积累估算相关存在困难。在本研究中，我们开发了一种玻璃中超短激光钻孔的模拟，包括脉冲间热积累计算。在该模拟模型中，温度被视为材料去除的附加标准，因此，可以估算重复频率的依赖性。研究了高温下激光吸收的两个模型参数，并在高环境温度下通过实验确定。使用该模拟模型，在高重复频率下实现了高形状预测精度，并通过与实验对比进行了验证。本研究可能有助于拓宽高重复频率超短脉冲激光器的应用范围。
