Lei Jincheng, Zhang Qi, Song Yang, Tang Jianan, Tong Jianhua, Peng Fei, Xiao Hai
Clemson University - Center for Intelligent Systems in Extreme Environment (CU-ISEE), Clemson, SC 29634, USA.
Department of Electrical and Computer Engineering, Clemson University, Clemson, SC 29634, USA.
Opt Laser Technol. 2020 Aug;128. doi: 10.1016/j.optlastec.2020.106223. Epub 2020 Mar 27.
We develop a laser-assisted sensor embedding process to embed all-glass optical fiber sensors into bulk ceramics for high-temperature applications. A specially designed two-step microchannel was fabricated on an AlO substrate for sensor embedment using a picosecond (ps) laser. An optical fiber Intrinsic Fabry-Perot Interferometer (IFPI) sensor was embedded at the bottom of the microchannel and covered by AlO slurry which was subsequently sintered by a CO laser. The sensor spectrum was in-situ monitored during the laser sintering process to ensure the survival of the sensor and optimize the laser sintering parameters. By testing in furnace through high temperature, the embedded optical fiber shows improved stability after CO laser sealing, resulting in the linear temperature response of the embedded optical fiber IFPI sensor. To improve the embedded IFPI sensor for thermal strain measurement, a dummy fiber was co-embedded with the sensing fiber to improve the mechanical bonding between the sensing fiber and the ceramic substrate so that the thermal strain of the ceramic substrate can apply on the sensing fiber. The response sensitivity, measurement repeatability and high-temperature long-term stability of the embedded optical fiber IFPI sensor were evaluated in this work.
我们开发了一种激光辅助传感器嵌入工艺，将全玻璃光纤传感器嵌入块状陶瓷中，用于高温应用。使用皮秒（ps）激光在AlO衬底上制造了一个专门设计的两步微通道，用于传感器嵌入。将光纤本征法布里-珀罗干涉仪（IFPI）传感器嵌入微通道底部，并用AlO浆料覆盖，随后用CO激光烧结。在激光烧结过程中对传感器光谱进行原位监测，以确保传感器存活并优化激光烧结参数。通过在高温炉中测试，嵌入的光纤在CO激光密封后显示出更高的稳定性，从而使嵌入的光纤IFPI传感器具有线性温度响应。为了改进用于热应变测量的嵌入式IFPI传感器，将一根虚拟光纤与传感光纤共同嵌入，以改善传感光纤与陶瓷衬底之间的机械结合，使陶瓷衬底的热应变能够施加到传感光纤上。在这项工作中，对嵌入式光纤IFPI传感器的响应灵敏度、测量重复性和高温长期稳定性进行了评估。
