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基于使用铝掺杂氧化铪薄膜的铁电场效应晶体管实现电可修改人工突触

Implementation of an electrically modifiable artificial synapse based on ferroelectric field-effect transistors using Al-doped HfO thin films.

作者信息

Yoon So-Jung, Moon Seung-Eon, Yoon Sung-Min

机构信息

Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi-do 17104, Korea.

出版信息

Nanoscale. 2020 Jul 2;12(25):13421-13430. doi: 10.1039/d0nr02401e.

Abstract

Human brain-like synaptic behaviors of the ferroelectric field-effect transistors (FeFETs) were emulated by introducing the metal-ferroelectric-metal-insulator-semiconductor (MFMIS) gate stacks employing Al-doped HfO2 (Al:HfO2) ferroelectric thin films even at a low operation voltage. The synaptic plasticity of the MFMIS-FETs could be gradually modulated by the partial polarization characteristics of the Al:HfO2 thin films, which were examined to be dependent on the applied pulse conditions. Based on the ferroelectric polarization switching dynamics of the Al:HfO2 thin films, the proposed devices successfully emulate biological synaptic functions, including excitatory post-synaptic current (EPSC), paired-pulse facilitation (PPF), and spike timing-dependent plasticity (STDP). The channel conductance of the FeFETs could be controlled by partially switching the ferroelectric polarization of the Al:HfO2 gate insulators by means of pulse-number and pulse-amplitude modulations. Furthermore, the 3 × 3 array integrated with the Al:HfO2 MFMIS-FETs was also fabricated, in which electrically modifiable weighted-sum operation could be well verified in the 3 × 3 synapse array configuration.

摘要

通过引入采用铝掺杂氧化铪(Al:HfO₂)铁电薄膜的金属 - 铁电体 - 金属 - 绝缘体 - 半导体(MFMIS)栅极堆叠结构,即使在低工作电压下,也能模拟出类似人类大脑的铁电场效应晶体管(FeFET)的突触行为。MFMIS - FET的突触可塑性可以通过Al:HfO₂薄膜的部分极化特性逐渐调节,研究发现其依赖于所施加的脉冲条件。基于Al:HfO₂薄膜的铁电极化切换动力学,所提出的器件成功模拟了生物突触功能,包括兴奋性突触后电流(EPSC)、双脉冲易化(PPF)和尖峰时间依赖可塑性(STDP)。通过脉冲数和脉冲幅度调制部分切换Al:HfO₂栅极绝缘体的铁电极化,可以控制FeFET的沟道电导。此外,还制作了集成Al:HfO₂ MFMIS - FET的3×3阵列,其中在3×3突触阵列配置中可以很好地验证电可修改的加权和运算。

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