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基于硅波导上单个倾斜狭缝的折射率微扰实现模式转换的理论分析。

Theoretical analysis of mode conversion by refractive-index perturbation based on a single tilted slot on a silicon waveguide.

作者信息

Huang Chia-Chih, Huang Chia-Chien

出版信息

Opt Express. 2020 Jun 22;28(13):18986-18999. doi: 10.1364/OE.394809.

DOI:10.1364/OE.394809
PMID:32672185
Abstract

We propose a compact mode converter operating at the mid-infrared wavelength of 3.4 µm, comprising an etched parallelogram slot filled with silicon nitride on a silicon-on-calcium fluoride platform. The tilted slot introduces transverse and longitudinal index perturbations on the waveguide eigenmodes, achieving mode conversion in the propagation direction. Differing from previous reports using massive parameter sweep, we provide analytical formulas to determine geometry parameters by considering the modified phase-matching condition and the profiles of coupling coefficient of coupled-mode theory. Rigorous 3D numerical examples demonstrate the transverse electric (TE)-to-TE, TE-to-TE, TE-to-TE, and TE-to-TE converters to achieve conversion efficiencies (inter-modal crosstalk [CT] values) of >92.7% (<-27 dB), >91.7% (<-16 dB), >88.2% (<-13 dB), and >75.8% (<-10 dB), respectively, with a total transmitted power of >93%. Converter device lengths range from 16.84 to 24.61 µm for TE-to-TE to TE-to-TE, respectively. Over a broadband wavelength of 100 nm, the conversion efficiency, power transmission, and maximum inter-modal CT are almost >80%, >90%, and <-10 dB, respectively. Also, the fabrication tolerance of the proposed structure is addressed. The proposed model can not only realize arbitrary mode-order conversion but extend to other wavelength bands. To validate the feasibility of our model, the numerical results of our device operating at the wavelength of 1.55 µm are also offered and compared with those of other reports. The proposed idea may pave a new approach to designing mode converters with arbitrary geometries.

摘要

我们提出了一种工作在3.4 µm中红外波长的紧凑型模式转换器,它由一个蚀刻的平行四边形槽构成,该槽位于氟化钙衬底上的硅平台上,并填充有氮化硅。倾斜的槽在波导本征模上引入横向和纵向折射率微扰,从而在传播方向上实现模式转换。与以往使用大量参数扫描的报道不同,我们通过考虑修正的相位匹配条件和耦合模理论的耦合系数分布,提供了确定几何参数的解析公式。严格的三维数值示例表明,横向电(TE)到TE、TE到TE、TE到TE和TE到TE的转换器分别实现了>92.7%(<-27 dB)、>91.7%(<-16 dB)、>88.2%(<-13 dB)和>75.8%(<-10 dB)的转换效率(模间串扰[CT]值),总传输功率>93%。TE到TE到TE到TE的转换器器件长度分别为16.84至24.61 µm。在100 nm的宽带波长范围内,转换效率、功率传输和最大模间CT分别几乎>80%、>90%和<-10 dB。此外,还讨论了所提出结构的制造容差。所提出的模型不仅可以实现任意模式阶数的转换,还可以扩展到其他波段。为了验证我们模型的可行性,还给出了我们的器件在1.55 µm波长下工作的数值结果,并与其他报道的结果进行了比较。所提出的想法可能为设计具有任意几何形状的模式转换器开辟一条新途径。

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