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在镍箔上快速、晶圆级生长纳米厚石墨薄膜及其结构分析。

Fast, wafer-scale growth of a nanometer-thick graphite film on Ni foil and its structural analysis.

作者信息

Deokar Geetanjali, Genovese Alessandro, Costa Pedro M F J

机构信息

King Abdullah University of Science and Technology (KAUST), Physical Science and Engineering Division, Thuwal 23955-6900, Saudi Arabia.

King Abdullah University of Science and Technology, Core Labs, Thuwal 23955-6900, Saudi Arabia.

出版信息

Nanotechnology. 2020 Nov 27;31(48):485605. doi: 10.1088/1361-6528/aba712.

Abstract

The growth of graphite on polycrystalline Ni by chemical vapor deposition (CVD) and the microstructural relation of the graphitic films and the metallic substrate continues to puzzle the scientific community. Here, we report the wafer-scale growth of a nanometer-thick graphite film (∼100 nm, NGF) on Ni foil via a fast-thermal CVD approach (5 min growth). Moreover, we shed light on how localized thickness variations of the NGF relate to the Ni surface topography and grain characteristics. While on a macro-scale (mm), the NGF film looks uniform-with a few hundred highly ordered graphene layers (d = 0.335 nm), when studied at the micro- and nano-scales, few-layer graphene sections can be identified. These are present at a density of 0.1%-3% areas in 100 µ m, can be as thin as two layers, and follow an epitaxial relation with the {111} fcc-Ni planes. Throughout the 50 cm NGF, the sharp graphite/substrate interfaces are either composed of a couple of NiC layers or a graphene layer. Moreover, the NGF was successfully transferred on SiO/Si substrate by a wet chemical etching method. The as-produced NGFs could complement or offer an alternative to the mm-thick films produced from natural graphite flakes or polymer sheets.

摘要

通过化学气相沉积(CVD)在多晶镍上生长石墨以及石墨薄膜与金属衬底的微观结构关系一直困扰着科学界。在此,我们报告了通过快速热CVD方法(5分钟生长时间)在镍箔上晶圆级生长纳米厚石墨薄膜(约100纳米,NGF)。此外,我们阐明了NGF的局部厚度变化与镍表面形貌和晶粒特性之间的关系。在宏观尺度(毫米)上,NGF薄膜看起来是均匀的——由几百个高度有序的石墨烯层组成(d = 0.335纳米),但在微观和纳米尺度研究时,可以识别出少层石墨烯区域。这些区域在100微米范围内的面积密度为0.1% - 3%,可以薄至两层,并与{111}面心立方镍平面存在外延关系。在整个50厘米的NGF中,清晰的石墨/衬底界面要么由几层NiC层组成,要么由一层石墨烯层组成。此外,通过湿化学蚀刻方法成功地将NGF转移到了SiO/Si衬底上。所制备的NGF可以补充或替代由天然石墨薄片或聚合物片材制成的毫米厚薄膜。

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