基于占空比控制的软化/硬化参数共振的大位移垂直静电微驱动器动力学
Large-Displacement Vertical Electrostatic Microactuator Dynamics using Duty-Cycled Softening/Stiffening Parametric Resonance.
作者信息
Li H, Barnes P, Harding E, Duan X, Wang T D, Oldham K R
机构信息
University of Michigan Medical School, Ann Arbor MI.
University of Michigan Department of Mechanical Engineering, Ann Arbor, MI 48109.
出版信息
J Microelectromech Syst. 2019 Jun;28(3):351-361. doi: 10.1109/jmems.2019.2911183. Epub 2019 Apr 26.
Abstract
Electrostatic microactuators with large vertical scanning range (several hundred microns) at high frequency (hundreds to thousands of hertz) and chips sizes compatible with endoscopic microscopy have recently been demonstrated based on parametric resonance. This paper examines the use and modeling of mixed softening/hardening dynamics to help produce large ranges of motion in this class of mirrors. Origin of spring stiffening behavior in actuator design is described, followed by non-dimensional analysis of actuator motion trends. Experimental results are presented for a sample actuator design with up to 480 m displacement at 1225 Hz and 60 V. Comparison to predicted trends and comments on benefits and limitations of modeling are provided.
摘要
基于参数共振，最近已展示出在高频（数百至数千赫兹）下具有大垂直扫描范围（数百微米）且芯片尺寸与内窥显微镜兼容的静电微致动器。本文研究了混合软化/硬化动力学的使用和建模，以帮助在此类镜子中产生大范围的运动。描述了致动器设计中弹簧刚度增强行为的起源，随后对致动器运动趋势进行了无量纲分析。给出了一个示例致动器设计的实验结果，在1225赫兹和60伏电压下位移可达480微米。提供了与预测趋势的比较以及对建模的优点和局限性的评论。
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IEEE Trans Med Imaging. 2017 Jul;36(7):1482-1490. doi: 10.1109/TMI.2017.2673022. Epub 2017 Feb 23.
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