用于可切换实时垂直/水平横截面成像的集成单片3D MEMS扫描仪。
Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging.
作者信息
Li Haijun, Duan Xiyu, Qiu Zhen, Zhou Quan, Kurabayashi Katsuo, Oldham Kenn R, Wang Thomas D
出版信息
Opt Express. 2016 Feb 8;24(3):2145-55. doi: 10.1364/OE.24.002145.
Abstract
We present an integrated monolithic, electrostatic 3D MEMS scanner with a compact chip size of 3.2 × 2.9 mm(2). Use of parametric excitation near resonance frequencies produced large optical deflection angles up to ± 27° and ± 28.5° in the X- and Y-axes and displacements up to 510 μm in the Z-axis with low drive voltages at atmospheric pressure. When packaged in a dual axes confocal endomicroscope, horizontal and vertical cross-sectional images can be collected seamlessly in tissue with a large field-of-view of >1 × 1 mm(2) and 1 × 0.41 mm(2), respectively, at 5 frames/sec.
摘要
我们展示了一种集成式单片静电3D MEMS扫描仪，其芯片尺寸紧凑，为3.2×2.9平方毫米。在接近共振频率处使用参数激励，在大气压力下以低驱动电压在X轴和Y轴上产生高达±27°和±28.5°的大光学偏转角，在Z轴上产生高达510μm的位移。当封装在双轴共聚焦内窥镜中时，可在组织中以5帧/秒的速度无缝采集水平和垂直横截面图像，水平方向的视野大于1×1平方毫米，垂直方向的视野为1×0.41平方毫米。
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