Joo Ki-Nam, Clark Erin, Zhang Yanqi, Ellis Jonathan D, Guzmán Felipe
J Opt Soc Am A Opt Image Sci Vis. 2020 Sep 1;37(9):B11-B18. doi: 10.1364/JOSAA.396298.
We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance.
我们介绍了一种紧凑型外差干涉仪的设计、台式装置及实验结果，该干涉仪在频率高于100 MHz的空气中可实现皮米级的位移灵敏度。采用空间分离光束的光学配置可防止频率和偏振混合，从而消除周期性误差。该干涉仪的设计旨在使共模激光束路径最大化，以获得对温度波动和声学等环境干扰的高抑制能力。我们的实验结果展示了该系统在静态和动态测量过程中的短期和长期稳定性。此外，我们还提供了将干涉仪原型与商用系统进行比较的测量结果，验证了我们的干涉仪具有3皮米的更高灵敏度、两倍的更高热稳定性以及无周期性误差的性能。
