Li Runmin, Tian Haochen, Shi Junkai, Ji Rongyi, Dong Dengfeng, Zhou Weihu
Optoelectronic Technology Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China.
Division of Time and Frequency Metrology, National Institute of Metrology, Beijing 100029, China.
Sensors (Basel). 2024 May 29;24(11):3497. doi: 10.3390/s24113497.
Absolute distance measurements based on optical frequency combs (OFCs) have greatly promoted advances in both science and technology, owing to the high precision, large non-ambiguity range (NAR), and a high update rate. However, cyclic error, which is extremely difficult to eliminate, reduces the linearity of measurement results. In this study, we quantitatively investigated the impact of cyclic error on absolute distance measurement using OFCs based on two types of interferometry: synthetic wavelength interferometry and single-wavelength interferometry. The numerical calculations indicate that selecting a suitable reference path length can minimize the impact of cyclic error when combining the two types of interferometry. Recommendations for selecting an appropriate synthetic wavelength to address the tradeoff between achieving a large NAR and minimizing the risk of failure when combining the two methods are provided. The results of this study are applicable not only in absolute distance measurements but also in other applications based on OFCs, such as surface profile, vibration analysis, etc.
基于光学频率梳（OFC）的绝对距离测量，由于其高精度、大无模糊范围（NAR）和高更新率，极大地推动了科学技术的进步。然而，循环误差极难消除，会降低测量结果的线性度。在本研究中，我们基于合成波长干涉测量法和单波长干涉测量法这两种干涉测量技术，定量研究了循环误差对使用OFC进行绝对距离测量的影响。数值计算表明，在结合这两种干涉测量技术时，选择合适的参考路径长度可使循环误差的影响最小化。本文还给出了关于选择合适合成波长的建议，以解决在结合这两种方法时实现大NAR与将失败风险降至最低之间的权衡问题。本研究结果不仅适用于绝对距离测量，还适用于基于OFC的其他应用，如表面轮廓测量、振动分析等。
