Femtosecond laser hybrid fabrication of a 3D microfluidic chip for PCR application.

Microfluidic chips have gradually become a focus of scientific research. However, the fabrication of key functional components in microfluidic chips is always limited by the existing processing methods. The microfluidic chip is difficult to be three-dimensional (3D) and integrated. In response to the key problems of 3D integrated microfluidic chip fabrication, this paper presents a hybrid method for fabricating a microfluidic chip integrated 3D microchannels and metal microstructures by femtosecond laser wet etch technology and liquid metal injection. The integrated microfluidic chip fabricated by this method is expected to be applied to the core reaction unit of integrated PCR devices.